Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11778720 | High efficiency laser-sustained plasma light source with collection of broadband radiation | Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin | 2023-10-03 |
| 11328411 | Print check repeater defect detection | Hong Chen, Kenong Wu, Xiaochun Li, James A. Smith, Qing Luo +7 more | 2022-05-10 |
| 11204332 | Repeater defect detection | Bjorn Brauer, Sumit Sen, Ashok Mathew, Sreeram Chandrasekaran, Lisheng Gao | 2021-12-21 |
| 11139216 | System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer | David Craig Oram, Abhinav Mathur, Kenong Wu | 2021-10-05 |
| 11138722 | Differential imaging for single-path optical wafer inspection | Anatoly Shchemelinin, Ilya Bezel | 2021-10-05 |
| 10976025 | Plasma cell for providing VUV filtering in a laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more | 2021-04-13 |
| 10887974 | High efficiency laser-sustained plasma light source | Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin | 2021-01-05 |
| 10714307 | Neutral atom imaging system | Ilya Bezel, Gildardo Delgado, Rudy F. Garcia | 2020-07-14 |
| 10714327 | System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination | Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine | 2020-07-14 |
| 10679909 | System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer | David Craig Oram, Abhinav Mathur, Kenong Wu | 2020-06-09 |
| 10648925 | Repeater defect detection | Bjorn Brauer, Sumit Sen, Ashok Mathew, Sreeram Chandrasekaran, Lisheng Gao | 2020-05-12 |
| 10520741 | System and method for separation of pump light and collected light in a laser pumped light source | Anatoly Shchemelinin, Ilya Bezel, Matthew Panzer | 2019-12-31 |
| 10395358 | High sensitivity repeater defect detection | Bjorn Brauer, Ashok Mathew, Chetana Bhaskar, Lisheng Gao, Santosh Bhattacharyya +2 more | 2019-08-27 |
| 10381216 | Continuous-wave laser-sustained plasma illumination source | Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer | 2019-08-13 |
| 10217625 | Continuous-wave laser-sustained plasma illumination source | Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer | 2019-02-26 |
| 9927094 | Plasma cell for providing VUV filtering in a laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more | 2018-03-27 |
| 9766187 | Repeater detection | Hong Chen, Kenong Wu, Masatoshi Yamaoka, Gangadharan Sivaraman, Raghav Babulnath +2 more | 2017-09-19 |
| 9766186 | Array mode repeater detection | Hong Chen, Kenong Wu, Masatoshi Yamaoka | 2017-09-19 |
| 9734422 | System and method for enhanced defect detection with a digital matched filter | Pavel Kolchin | 2017-08-15 |
| 9727047 | Defect detection using structural information | Qing Luo, Kenong Wu, Hucheng Lee, Lisheng Gao, Yan Xiong +1 more | 2017-08-08 |
| 9709811 | System and method for separation of pump light and collected light in a laser pumped light source | Anatoly Shchemelinin, Ilya Bezel, Matthew Panzer | 2017-07-18 |
| 9355208 | Detecting defects on a wafer | Ashok Kulkarni, Kris Bhaskar, Graham Michael Lynch, John R. Jordan, Chwen-Jiann Fang | 2016-05-31 |
| 9262821 | Inspection recipe setup from reference image variation | Chetana Bhaskar, Ashok Kulkarni, Chien-Huei Chen, Kris Bhaskar, Brian Duffy | 2016-02-16 |
| 9171364 | Wafer inspection using free-form care areas | Kenong Wu, Tao Luo, Lisheng Gao, Aravindh Balaji | 2015-10-27 |
| 9053390 | Automated inspection scenario generation | Mohan Mahadevan, Govind Thattaisundaram, Ajay Gupta, Chien-Huei Chen, Jason Kirkwood +3 more | 2015-06-09 |