Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10887580 | Three-dimensional imaging for semiconductor wafer inspection | Robert M. Danen, Philip Measor | 2021-01-05 |
| 10571407 | Determining information for defects on wafers | Stefano Palomba, Mikhail Haurylau, Robert M. Danen, David W. Shortt | 2020-02-25 |
| 10317347 | Determining information for defects on wafers | Stefano Palomba, Mikhail Haurylau, Robert M. Danen, David W. Shortt | 2019-06-11 |
| 10215713 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Mikhail Haurylau, Junwei Wei, Dan Kapp, Robert M. Danen, Grace Hsiu-Ling Chen | 2019-02-26 |
| 10132760 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Richard Wallingford, Lisheng Gao, Grace Hsiu-Ling Chen, Markus Huber, Robert M. Danen | 2018-11-20 |
| 9989479 | System and method to determine depth for optical wafer inspection | Mikhail Haurylau, Robert M. Danen | 2018-06-05 |
| 9734422 | System and method for enhanced defect detection with a digital matched filter | Eugene Shifrin | 2017-08-15 |
| 9726617 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Richard Wallingford, Lisheng Gao, Grace Hsiu-Ling Chen, Markus Huber, Robert M. Danen | 2017-08-08 |
| 9709510 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Mikhail Haurylau, Junwei Wei, Dan Kapp, Robert M. Danen, Grace Hsiu-Ling Chen | 2017-07-18 |
| 9389349 | System and method to determine depth for optical wafer inspection | Mikhail Haurylau, Robert M. Danen | 2016-07-12 |