Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11383429 | 3D printed optofluidic device and methods of fabrication | — | 2022-07-12 |
| 11047806 | Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures | Santosh Bhattacharyya, Devashish Sharma, Christopher Maher, Bo Hua, Robert M. Danen | 2021-06-29 |
| 10928740 | Three-dimensional calibration structures and methods for measuring buried defects on a three-dimensional semiconductor wafer | Robert M. Danen | 2021-02-23 |
| 10887580 | Three-dimensional imaging for semiconductor wafer inspection | Pavel Kolchin, Robert M. Danen | 2021-01-05 |
| 10249546 | Reverse decoration for defect detection amplification | Robert M. Danen, Paul MacDonald | 2019-04-02 |
| 10018571 | System and method for dynamic care area generation on an inspection tool | Vijayakumar Ramachandran, Ravikumar Sanapala, Vidyasagar Anantha, Rajesh Manepalli, Jing-Jing FANG | 2018-07-10 |
| 7995890 | Device for light-based particle manipulation on waveguides | Holger Schmidt, Sergei Kuehn | 2011-08-09 |