Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692690 | Care areas for improved electron beam defect detection | Arpit Yati, Saravanan Paramasivam, Martin Plihal, Jincheng Lin | 2020-06-23 |
| 10620134 | Creating defect samples for array regions | Manikandan Mariyappan, Raghav Babulnath, Gangadharan Sivaraman, Satya Kurada, Thirupurasundari Jayaraman +2 more | 2020-04-14 |
| 10018571 | System and method for dynamic care area generation on an inspection tool | Vijayakumar Ramachandran, Ravikumar Sanapala, Philip Measor, Rajesh Manepalli, Jing-Jing FANG | 2018-07-10 |
| 9714905 | Wafer inspection recipe setup | Martin Plihal, Deepak Gupta, Premkumar Vijayaraman, Lakshman Deenadayalan | 2017-07-25 |
| 9582869 | Dynamic binning for diversification and defect discovery | Martin Plihal | 2017-02-28 |
| 8948494 | Unbiased wafer defect samples | Martin Plihal, Saravanan Paramasivam, Chris W. Lee | 2015-02-03 |