MP

Martin Plihal

KL Kla-Tencor: 33 patents #22 of 1,394Top 2%
KL Kla: 8 patents #28 of 758Top 4%
KL Kla-Tenor: 1 patents #2 of 33Top 7%
📍 Pleasanton, CA: #130 of 3,062 inventorsTop 5%
🗺 California: #10,539 of 386,348 inventorsTop 3%
Overall (All Time): #71,756 of 4,157,543Top 2%
42
Patents All Time

Issued Patents All Time

Showing 1–25 of 42 patents

Patent #TitleCo-InventorsDate
12299848 Deep learning image denoising for semiconductor-based applications Aditya Gulati, Raghavan Konuru, Niveditha Lakshmi Narasimhan, Saravanan Paramasivam, Prasanti Uppaluri 2025-05-13
12235224 Process window qualification modulation layouts Andrew Cross, Kaushik Sah 2025-02-25
11676264 System and method for determining defects using physics-based image perturbations Saravanan Paramasivam, Jacob George, Niveditha Lakshmi Narasimhan, Sairam Ravu, Somesh Challapalli +1 more 2023-06-13
11514357 Nuisance mining for novel defect discovery 2022-11-29
11379969 Method for process monitoring with optical inspections Prasanti Uppaluri, Saravanan Paramasivam 2022-07-05
11379967 Methods and systems for inspection of semiconductor structures with automatically generated defect features Jacob George, Saravanan Paramasivam, Niveditha Lakshmi Narasimhan, Sairam Ravu, Prasanti Uppaluri 2022-07-05
11237119 Diagnostic methods for the classifiers and the defects captured by optical tools Erfan Soltanmohammadi, Saravanan Paramasivam, Sairam Ravu, Ankit Jain, Prasanti Uppaluri +1 more 2022-02-01
11151707 System and method for difference filter and aperture selection using shallow deep learning Santosh Bhattacharyya, Jacob George, Saravanan Paramasivam 2021-10-19
11119060 Defect location accuracy using shape based grouping guided defect centering Jagdish Chandra Saraswatula 2021-09-14
11114324 Defect candidate generation for inspection Erfan Soltanmohammadi, Prasanti Uppaluri, Mohit Jani, Chris Maher 2021-09-07
11055840 Semiconductor hot-spot and process-window discovery combining optical and electron-beam inspection Ardis Liang, Saravanan Paramasivam, Niveditha Lakshmi Narasimhan, Sandeep Bhagwat 2021-07-06
10964013 System, method for training and applying defect classifiers in wafers having deeply stacked layers Ankit Jain 2021-03-30
10902579 Creating and tuning a classifier to capture more defects of interest during inspection Erfan Soltanmohammadi, Tai-Kam Ng, Sang Hyun Lee 2021-01-26
10832396 And noise based care areas Brian Duffy, Santosh Bhattacharyya, Gordon Rouse, Chris Maher, Erfan Soltanmohammadi 2020-11-10
10699926 Identifying nuisances and defects of interest in defects detected on a wafer Brian Duffy, Mike VonDenHoff, Andrew Cross, Kaushik Sah, Antonio Mani 2020-06-30
10692690 Care areas for improved electron beam defect detection Vidyasagar Anantha, Arpit Yati, Saravanan Paramasivam, Jincheng Lin 2020-06-23
10670536 Mode selection for inspection Saravanan Paramasivam, Ankit Jain, Prasanti Uppaluri, Raghavan Konuru 2020-06-02
10436720 Adaptive automatic defect classification Li He, Huajun Ying, Anadi Bhatia, Amitoz Singh Dandiana, Ramakanth Ramini 2019-10-08
10338004 Production sample shaping that preserves re-normalizability Ankit Jain, Michael Lennek 2019-07-02
10267748 Optimizing training sets used for setting up inspection-related algorithms Erfan Soltanmohammadi, Saravanan Paramasivam, Sairam Ravu, Ankit Jain, Sarath Shekkizhar +1 more 2019-04-23
9983148 System and method for production line monitoring Saravanan Paramasivam 2018-05-29
9984454 System, method and computer program product for correcting a difference image generated from a comparison of target and reference dies 2018-05-29
9940705 System, method and computer program product for detecting defects in a fabricated target component using consistent modulation for the target and reference components Allen Park 2018-04-10
9891538 Adaptive sampling for process window determination 2018-02-13
9835566 Adaptive nuisance filter Ardis Liang, Raghav Babulnath, Sankar Venkataraman 2017-12-05