Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9714905 | Wafer inspection recipe setup | Deepak Gupta, Vidyasagar Anantha, Premkumar Vijayaraman, Lakshman Deenadayalan | 2017-07-25 |
| 9613411 | Creating defect classifiers and nuisance filters | Raghavan Konuru, Naema Bhatti, Michael Lennek | 2017-04-04 |
| 9582869 | Dynamic binning for diversification and defect discovery | Vidyasagar Anantha | 2017-02-28 |
| 9518934 | Wafer defect discovery | Hong Chen, Kenong Wu, Vidur Pandita, Ravikumar Sanapala, Vivek Bhagat +4 more | 2016-12-13 |
| 9430743 | Composite defect classifier | — | 2016-08-30 |
| 8948494 | Unbiased wafer defect samples | Vidyasagar Anantha, Saravanan Paramasivam, Chris W. Lee | 2015-02-03 |
| 8594823 | Scanner performance comparison and matching using design and defect data | Allen Park, Ellis Chang, Masami Aoki, Chris Chih-Chien Young, Michael J. Van Riet | 2013-11-26 |
| 8537349 | Monitoring of time-varying defect classification performance | Patrick Huet, Brian Duffy, Thomas Trautzsch, Chris Maher | 2013-09-17 |
| 8289510 | Process excursion detection | Patrick Huet, Robinson Piramuthu, Christopher Lee, Cho H. Teh, Yan Xiong | 2012-10-16 |
| 8165837 | Multi-scale classification of defects | Saravanan Paramasivam, Patrick Huet, Luc Debarge | 2012-04-24 |
| 7646476 | Process excursion detection | Patrick Huet, Robinson Piramuthu, Christopher Lee, Cho H. Teh, Yan Xiong | 2010-01-12 |
| 7570797 | Methods and systems for generating an inspection process for an inspection system | David Wang, Patrick Huet, Tong Huang, Adam Chen, Mike Van Riet +1 more | 2009-08-04 |
| 7417724 | Wafer inspection systems and methods for analyzing inspection data | Paul Sullivan, George Kren, Eliezer Rosengaus, Patrick Huet, Robinson Piramuthu +1 more | 2008-08-26 |
| 7394534 | Process excursion detection | Patrick Huet, Robinson Piramuthu, Christopher Lee, Cho H. Teh, Yan Xiong | 2008-07-01 |
| 7227628 | Wafer inspection systems and methods for analyzing inspection data | Paul Sullivan, George Kren, Eliezer Rosengaus, Patrick Huet, Robinson Piramuthu +1 more | 2007-06-05 |
| 7006886 | Detection of spatially repeating signatures | Patrick Huet, Robinson Piramuthu | 2006-02-28 |
| 6718526 | Spatial signature analysis | Peter Eldredge, Patrick Huet, Robinson Piramuthu, Sandeep Bhagwat, Kai-Chih Chi +3 more | 2004-04-06 |