| 9601393 |
Selecting one or more parameters for inspection of a wafer |
Chris W. Lee, Lisheng Gao, Tao Luo, Kenong Wu, Tommaso Torelli +1 more |
2017-03-21 |
| 9483819 |
Contour-based array inspection of patterned defects |
Chien-Huei Chen, Ajay Gupta, Thanh Huy Ha, Jianwei Wang, Hedong Yang +1 more |
2016-11-01 |
| 9318395 |
Systems and methods for preparation of samples for sub-surface defect review |
Cecelia Campochiaro, Hong Xiao, Benjamin James Thomas Clarke, Harsh Sinha |
2016-04-19 |
| 9310316 |
Selecting parameters for defect detection methods |
Kenong Wu, Chris W. Lee, Yi-Chang Liu |
2016-04-12 |
| 9087367 |
Determining design coordinates for wafer defects |
Ellis Chang, Allen Park, Khurram Zafar, Santosh Bhattacharyya |
2015-07-21 |
| 8669523 |
Contour-based defect detection using an inspection apparatus |
Chien-Huei Chen, Peter White, Sankar Venkataraman, Hai Jiang, Hedong Yang +1 more |
2014-03-11 |
| 8594823 |
Scanner performance comparison and matching using design and defect data |
Allen Park, Ellis Chang, Masami Aoki, Chris Chih-Chien Young, Martin Plihal |
2013-11-26 |
| 8135204 |
Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe |
Chien-Huei Chen, Barry G. Becker, Hong Chen, Chris Maher, Stephanie Chen +2 more |
2012-03-13 |
| 8000922 |
Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm |
Hong Chen, Chien-Huei Chen, Jason Z. Lin, Chris Maher, Michal Kowalski +4 more |
2011-08-16 |
| 7522664 |
Remote live video inspection |
Krishnamurthy Bhaskar, Mark J. Roulo, Stewart Hill |
2009-04-21 |
| 7345753 |
Apparatus and methods for analyzing defects on a sample |
Kris Bhaskar, Ardis Liang |
2008-03-18 |