| 11114324 |
Defect candidate generation for inspection |
Martin Plihal, Erfan Soltanmohammadi, Prasanti Uppaluri, Mohit Jani |
2021-09-07 |
| 10832396 |
And noise based care areas |
Brian Duffy, Martin Plihal, Santosh Bhattacharyya, Gordon Rouse, Erfan Soltanmohammadi |
2020-11-10 |
| 10604433 |
Emancipative waste activated sludge stripping to remove internal phosphorus (“eWASSTRIP”) |
Mike Gates, Robert Baur |
2020-03-31 |
| 9489599 |
Decision tree construction for automatic classification of defects on semiconductor wafers |
Chien-Huei Chen, Patrick Huet, Tai-Kam Ng, John R. Jordan |
2016-11-08 |
| 8537349 |
Monitoring of time-varying defect classification performance |
Patrick Huet, Brian Duffy, Martin Plihal, Thomas Trautzsch |
2013-09-17 |
| 8135204 |
Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe |
Chien-Huei Chen, Barry G. Becker, Hong Chen, Michael J. Van Riet, Stephanie Chen +2 more |
2012-03-13 |
| 8126255 |
Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions |
Kris Bhaskar, Chetana Bhaskar, Ashok Kulkarni, Eliezer Rosengaus, Cecelia Campochiaro +6 more |
2012-02-28 |
| 8073240 |
Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer |
Verlyn Michael Fischer, Harish P. Hiriyannaiah, Younus Vora, Ping Ding, Andrew V. Hill |
2011-12-06 |
| 8000922 |
Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm |
Hong Chen, Michael J. Van Riet, Chien-Huei Chen, Jason Z. Lin, Michal Kowalski +4 more |
2011-08-16 |