Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9489599 | Decision tree construction for automatic classification of defects on semiconductor wafers | Chien-Huei Chen, Chris Maher, Tai-Kam Ng, John R. Jordan | 2016-11-08 |
| 9037280 | Computer-implemented methods for performing one or more defect-related functions | Mark Dishner, Chris W. Lee, Sharon McCauley, David Wang | 2015-05-19 |
| 8537349 | Monitoring of time-varying defect classification performance | Brian Duffy, Martin Plihal, Thomas Trautzsch, Chris Maher | 2013-09-17 |
| 8289510 | Process excursion detection | Robinson Piramuthu, Martin Plihal, Christopher Lee, Cho H. Teh, Yan Xiong | 2012-10-16 |
| 8165837 | Multi-scale classification of defects | Saravanan Paramasivam, Martin Plihal, Luc Debarge | 2012-04-24 |
| 7646476 | Process excursion detection | Robinson Piramuthu, Martin Plihal, Christopher Lee, Cho H. Teh, Yan Xiong | 2010-01-12 |
| 7570797 | Methods and systems for generating an inspection process for an inspection system | David Wang, Tong Huang, Martin Plihal, Adam Chen, Mike Van Riet +1 more | 2009-08-04 |
| 7417724 | Wafer inspection systems and methods for analyzing inspection data | Paul Sullivan, George Kren, Eliezer Rosengaus, Robinson Piramuthu, Martin Plihal +1 more | 2008-08-26 |
| 7394534 | Process excursion detection | Robinson Piramuthu, Martin Plihal, Christopher Lee, Cho H. Teh, Yan Xiong | 2008-07-01 |
| 7227628 | Wafer inspection systems and methods for analyzing inspection data | Paul Sullivan, George Kren, Eliezer Rosengaus, Robinson Piramuthu, Martin Plihal +1 more | 2007-06-05 |
| 7142992 | Flexible hybrid defect classification for semiconductor manufacturing | Maruti Shanbhag, Sandeep Bhagwat, Michal Kowalski, Vivekanand Kini, David Randall +8 more | 2006-11-28 |
| 7006886 | Detection of spatially repeating signatures | Robinson Piramuthu, Martin Plihal | 2006-02-28 |
| 6718526 | Spatial signature analysis | Peter Eldredge, Robinson Piramuthu, Sandeep Bhagwat, Kai-Chih Chi, Kai Liu +3 more | 2004-04-06 |