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Decision tree construction for automatic classification of defects on semiconductor wafers |
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2016-11-08 |
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Computer-implemented methods for performing one or more defect-related functions |
Mark Dishner, Chris W. Lee, Sharon McCauley, David Wang |
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Monitoring of time-varying defect classification performance |
Brian Duffy, Martin Plihal, Thomas Trautzsch, Chris Maher |
2013-09-17 |
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Process excursion detection |
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2012-10-16 |
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Multi-scale classification of defects |
Saravanan Paramasivam, Martin Plihal, Luc Debarge |
2012-04-24 |
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Process excursion detection |
Robinson Piramuthu, Martin Plihal, Christopher Lee, Cho H. Teh, Yan Xiong |
2010-01-12 |
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Methods and systems for generating an inspection process for an inspection system |
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Wafer inspection systems and methods for analyzing inspection data |
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2008-08-26 |
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Process excursion detection |
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2008-07-01 |
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Wafer inspection systems and methods for analyzing inspection data |
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2007-06-05 |
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Flexible hybrid defect classification for semiconductor manufacturing |
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2006-11-28 |
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Detection of spatially repeating signatures |
Robinson Piramuthu, Martin Plihal |
2006-02-28 |
| 6718526 |
Spatial signature analysis |
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2004-04-06 |