Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9534848 | Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures | Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Erik Kim, Rudolf Brunner +7 more | 2017-01-03 |
| 9110037 | Diode laser based broad band light sources for wafer inspection tools | Anant Chimmalgi, Rudolf Brunner | 2015-08-18 |
| 8896827 | Diode laser based broad band light sources for wafer inspection tools | Anant Chimmalgi, Rudolf Brunner | 2014-11-25 |
| 8073240 | Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer | Verlyn Michael Fischer, Chris Maher, Harish P. Hiriyannaiah, Ping Ding, Andrew V. Hill | 2011-12-06 |
| 5386317 | Method and apparatus for imaging dense linewidth features using an optical microscope | Timothy R. Corle, Kamran Sarmadi | 1995-01-31 |