AC

Anant Chimmalgi

KL Kla-Tencor: 21 patents #48 of 1,394Top 4%
CA Carbon: 3 patents #40 of 114Top 40%
KL Kla: 1 patents #347 of 758Top 50%
Overall (All Time): #158,025 of 4,157,543Top 4%
25
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12240164 Window variability correction in additive manufacturing Jiayao Zhang, James Bennett, Bob E. Feller 2025-03-04
11104061 Stereolithography apparatus with individually addressable light source arrays Jean-Claude de Sugny 2021-08-31
11084207 Window variability correction in additive manufacturing Jiayao Zhang, James Bennett, Bob E. Feller 2021-08-10
10976025 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine +3 more 2021-04-13
10522340 Broadband light source including transparent portion with high hydroxide content Lauren Wilson, Matthew Panzer, Ilya Bezel 2019-12-31
10283342 Laser sustained plasma light source with graded absorption features Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Matthew Panzer, Lauren Wilson +1 more 2019-05-07
10257918 System and method for laser-sustained plasma illumination Sebaek Oh, Joshua Wittenberg, Lauren Wilson, Rahul Yadav, Ilya Bezel +2 more 2019-04-09
10244613 System and method for electrodeless plasma ignition in laser-sustained plasma light source Rudolf Brunner, Anatoly Shchemelinin, Ilya Bezel, Erik Kim, Rajeev Patil 2019-03-26
10032620 Broadband light source including transparent portion with high hydroxide content Lauren Wilson, Matthew Panzer, Ilya Bezel 2018-07-24
9941655 High power broadband light source Rahul Yadav, Anatoly Shchemelinin, Ilya Bezel, Matthew Derstine 2018-04-10
9927094 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine +3 more 2018-03-27
9899205 System and method for inhibiting VUV radiative emission of a laser-sustained plasma source Ilya Bezel, Kenneth P. Gross, Lauren Wilson, Rahul Yadav, Joshua Wittenberg +3 more 2018-02-20
9887076 Method and system for controlling convective flow in a light-sustained plasma Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt +2 more 2018-02-06
9721761 Open plasma lamp for forming a light-sustained plasma Lauren Wilson, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado 2017-08-01
9615439 System and method for inhibiting radiative emission of a laser-sustained plasma source Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Richard W. Solarz, Lauren Wilson +4 more 2017-04-04
9534848 Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures Jincheng Wang, Rajeev Patil, Erik Kim, Rudolf Brunner, Quang Giang +7 more 2017-01-03
9530636 Light source with nanostructured antireflection layer Sebaek Oh, Rahul Yadav, Matthew Derstine, Ilya Bezel 2016-12-27
9390902 Method and system for controlling convective flow in a light-sustained plasma Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt +2 more 2016-07-12
9341761 Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes Rahul Yadav, Joshua Wittenberg 2016-05-17
9318311 Plasma cell for laser-sustained plasma light source Anatoly Shchemelinin, Ilya Bezel, Rajeev Patil 2016-04-19
9263238 Open plasma lamp for forming a light-sustained plasma Lauren Wilson, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado 2016-02-16
9232622 Gas refraction compensation for laser-sustained plasma bulbs Ilya Bezel, Anatoly Shchemelinin, Alex Salnik 2016-01-05
9110037 Diode laser based broad band light sources for wafer inspection tools Younus Vora, Rudolf Brunner 2015-08-18
8896827 Diode laser based broad band light sources for wafer inspection tools Younus Vora, Rudolf Brunner 2014-11-25
8853655 Gas refraction compensation for laser-sustained plasma bulbs Ilya Bezel, Anatoly Shchemelinin, Alex Salnik 2014-10-07