Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11035804 | System and method for x-ray imaging and classification of volume defects | Oleg Khodykin, Bosheng Zhang, Steven R. Lange | 2021-06-15 |
| 9899205 | System and method for inhibiting VUV radiative emission of a laser-sustained plasma source | Ilya Bezel, Kenneth P. Gross, Lauren Wilson, Rahul Yadav, Joshua Wittenberg +3 more | 2018-02-20 |
| 9735534 | Sub 200nm laser pumped homonuclear excimer lasers | Ilya Bezel, Anatoly Shchemelinin | 2017-08-15 |
| 9723703 | System and method for transverse pumping of laser-sustained plasma | Ilya Bezel, Anatoly Shchemelinin, Sebaek Oh, Matthew Derstine | 2017-08-01 |
| 9615439 | System and method for inhibiting radiative emission of a laser-sustained plasma source | Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Lauren Wilson, Rahul Yadav +4 more | 2017-04-04 |
| 9519033 | High throughput hot testing method and system for high-brightness light-emitting diodes | — | 2016-12-13 |
| 9377414 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, David Shafer, Bin-Ming Benjamin Tsai, David L. Brown | 2016-06-28 |
| 8927944 | High throughput hot testing method and system for high-brightness light-emitting diodes | — | 2015-01-06 |
| 8698399 | Multi-wavelength pumping to sustain hot plasma | Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Derstine | 2014-04-15 |
| 8692986 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, David Shafer, Bin-Ming Benjamin Tsai, David L. Brown | 2014-04-08 |
| 8649646 | Coherent DUV illumination for semiconductor wafer inspection | — | 2014-02-11 |
| 8575576 | Optical imaging system with laser droplet plasma illuminator | Stephane Durant, Shiow-Hwei Hwang | 2013-11-05 |
| 8553217 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, David Shafer, Bin-Ming Benjamin Tsai, David L. Brown | 2013-10-08 |
| 8218221 | Indium rich InGaN LED line monitor | — | 2012-07-10 |
| 7295739 | Coherent DUV illumination for semiconductor wafer inspection | — | 2007-11-13 |
| 6738399 | Microchannel cooled edge cladding to establish an adiabatic boundary condition in a slab laser | Georg F. Albrecht, Raymond J. Beach | 2004-05-18 |
| 6661580 | High transmission optical inspection tools | — | 2003-12-09 |