Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119060 | Defect location accuracy using shape based grouping guided defect centering | Martin Plihal | 2021-09-14 |
| 11035666 | Inspection-guided critical site selection for critical dimension measurement | Arpit Yati, Hari Pathangi | 2021-06-15 |
| 10957608 | Guided scanning electron microscopy metrology based on wafer topography | Arpit Yati, Shivam Agarwal, Andrew Cross | 2021-03-23 |
| 10901391 | Multi-scanning electron microscopy for wafer alignment | Jens Timo Neumann, Philipp Huethwohl, Thomas Korb, Raghavendra Hanumantha Nayak | 2021-01-26 |
| 10714366 | Shape metric based scoring of wafer locations | Saibal Banerjee | 2020-07-14 |
| 10503078 | Criticality analysis augmented process window qualification sampling | Saibal Banerjee, Ashok Kulkarni | 2019-12-10 |
| 9965848 | Shape based grouping | Saibal Banerjee, Ashok Kulkarni, Santosh Bhattacharyya | 2018-05-08 |