Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360058 | Integration of an optical height sensor in mask inspection tools | Dmitry Skvortsov, Zhengyu Guo, Zhengcheng Lin, Nicolas Steven Juliano, Rui-fang Shi | 2025-07-15 |
| 11968772 | Optical etendue matching methods for extreme ultraviolet metrology | Larissa Juschkin, Daniel Wack | 2024-04-23 |
| 11268911 | Boron-based capping layers for EUV optics | Gildardo Delgado, Shannon Hill | 2022-03-08 |
| 11156926 | Vacuum actuator containment for molecular contaminant and particle mitigation | Gildardo Delgado, Rudy F. Garcia, Joseph Walsh, Matthew Bernard McLaughlin Hoffman | 2021-10-26 |
| 10840055 | System and method for photocathode illumination inspection | Gildardo Delgado, Katerina Ioakeimidi, Frances Hill, Rudy F. Garcia, Mike Romero +1 more | 2020-11-17 |
| 10741354 | Photocathode emitter system that generates multiple electron beams | Gildardo Delgado, Katerina Ioakeimidi, Rudy F. Garcia, Gary V. Lopez Lopez, Frances Hill +1 more | 2020-08-11 |
| 10714294 | Metal protective layer for electron emitters with a diffusion barrier | Frances Hill, Gildardo Delgado, Rudy F. Garcia, Gary V. Lopez Lopez, Michael E. Romero +1 more | 2020-07-14 |