Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360058 | Integration of an optical height sensor in mask inspection tools | Zefram Marks, Zhengyu Guo, Zhengcheng Lin, Nicolas Steven Juliano, Rui-fang Shi | 2025-07-15 |
| 11639892 | Systems and methods for skewed basis set fitting | J. Brian Leen, Kyle Owen, John Savee, Paul L. Hansen, Raphael N. Desbiens | 2023-05-02 |
| 11442021 | Broadband light interferometry for focal-map generation in photomask inspection | Rui-fang Shi | 2022-09-13 |
| 9244121 | Systems and method for laser voltage imaging state mapping | Yin Shyang Ng | 2016-01-26 |
| 8754633 | Systems and method for laser voltage imaging state mapping | Yin Shyang Ng | 2014-06-17 |