Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11968772 | Optical etendue matching methods for extreme ultraviolet metrology | Zefram Marks, Daniel Wack | 2024-04-23 |
| 11499924 | Determining one or more characteristics of light in an optical system | Konstantin Tsigutkin | 2022-11-15 |
| 11293880 | Method and apparatus for beam stabilization and reference correction for EUV inspection | Konstantin Tsigutkin, Debashis De Munshi | 2022-04-05 |
| 7378666 | Irradiation device for testing objects coated with light-sensitive paint | Wolf-Dieter Domke, Karl Kragler, Rainer Lebert, Manfred Meisen | 2008-05-27 |
| 6856395 | Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent manner | Rainer Lebert, Ulf Heim, Lutz Aschke | 2005-02-15 |