Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11615897 | Microscopic system for testing structures and defects on EUV lithography photomasks | Christoph Sebastian Phiesel, Thomas Missalla, Andreas Biermanns-Foeth, Christian Piel | 2023-03-28 |
| 7619232 | Method and device for producing extreme ultraviolet radiation or soft X-ray radiation | Martin Schmidt, Uwe Stamm | 2009-11-17 |
| 7378666 | Irradiation device for testing objects coated with light-sensitive paint | Wolf-Dieter Domke, Larissa Juschkin, Karl Kragler, Manfred Meisen | 2008-05-27 |
| 6856395 | Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent manner | Ulf Heim, Lutz Aschke, Larissa Juschkin | 2005-02-15 |
| 6788763 | Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge | Willi Neff, Klaus Bergmann, Oliver Rosier | 2004-09-07 |
| 6389106 | Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge | Willi Neff, Guido Schriever, Klaus Bergmann | 2002-05-14 |
| 5023897 | Device for generating X-radiation with a plasma source | Willi Neff, Raymond Holz, Franz Richter | 1991-06-11 |