Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11615897 | Microscopic system for testing structures and defects on EUV lithography photomasks | Rainer Lebert, Christoph Sebastian Phiesel, Andreas Biermanns-Foeth, Christian Piel | 2023-03-28 |
| 8686372 | Method for the spatially resolved measurement of parameters in a cross section of a beam bundle of high-energy radiation of high intensity | Max Christian Schuermann, Denis Bolshukhin, Boris Tkachenko | 2014-04-01 |
| 7328885 | Plasma radiation source and device for creating a gas curtain for plasma radiation sources | Max Christian Schuermann, Bernd Seher, Lutz Mueller | 2008-02-12 |
| 7329876 | Narrow-band transmission filter for EUV radiation | Max Christian Schuermann | 2008-02-12 |