Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D877225 | Beam expander | Stefan Franz | 2020-03-03 |
| 7328885 | Plasma radiation source and device for creating a gas curtain for plasma radiation sources | Max Christian Schuermann, Lutz Mueller, Thomas Missalla | 2008-02-12 |
| 5535250 | Device for manipulating a synchrotron beam bundle | Frank Reuther, Lutz Mueller | 1996-07-09 |
| 5515410 | Irradiation device for deep x-ray lithography | Rudi Neuland, Frank Reuther | 1996-05-07 |