Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699425 | Device and method for transferring microstructures | Alf Springer, Lutz Mueller | 2004-03-02 |
| 6416311 | Device and method for separating a shaped substrate from a stamping tool | Alf Springer, Lutz Mueller | 2002-07-09 |
| 5993189 | Apparatus for molding microsystem structures | Lutz Mueller, Alf Springer, Matthias Heckele, Hans Biedermann | 1999-11-30 |
| 5535250 | Device for manipulating a synchrotron beam bundle | Bernd Seher, Lutz Mueller | 1996-07-09 |
| 5515410 | Irradiation device for deep x-ray lithography | Bernd Seher, Rudi Neuland | 1996-05-07 |