| 9632419 |
Radiation source |
Jan Bernard Plechelmus Van Schoot, Vadim Yevgenyevich Banine, Olav Waldemar Vladimir Frijns, Hermanus Johannes Maria Kreuwel, Johannes Hubertus Josephina Moors +3 more |
2017-04-25 |
$3,723,000 |
| 9110377 |
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method |
Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Erik Petrus Buurman |
2015-08-18 |
$4,290,000 |
| 9091944 |
Source collector, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Gerardus Hubertus Petrus Maria Swinkels, Sven Pekelder, Dzmitry Labetski +1 more |
2015-07-28 |
$21,594,000 |
| 8547525 |
EUV radiation generation apparatus |
Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels |
2013-10-01 |
$10,510,000 |
| 8368040 |
Radiation system and lithographic apparatus |
Erik Roelof Loopstra, Vladimir Vitalevich Ivanov, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels, Andrei Mikhailovich Yakunin +1 more |
2013-02-05 |
$8,235,000 |
| 7619232 |
Method and device for producing extreme ultraviolet radiation or soft X-ray radiation |
Martin Schmidt, Rainer Lebert |
2009-11-17 |
$7,514,000 |
| 7266137 |
Laser gas replenishment method |
Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin +3 more |
2007-09-04 |
|
| 7075963 |
Tunable laser with stabilized grating |
Dirk Basting, Wolfgang Zschocke, Thomas Schroeder, Juergen Kleinschmidt, Matthias Kramer |
2006-07-11 |
|
| 7006541 |
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp |
Peter Lokai, Thomas Schroeder, Juergen Kleinschmidt, Klaus Vogler |
2006-02-28 |
|
| 6965624 |
Laser gas replenishment method |
Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin +3 more |
2005-11-15 |
|
| 6894285 |
Arrangement for monitoring the energy radiated by an EUV radiation source |
Juergen Kleinschmidt |
2005-05-17 |
|
| 6882704 |
Radiation source for generating extreme ultraviolet radiation |
Guido Schriever, Kai Gaebel |
2005-04-19 |
|
| 6862307 |
Electrical excitation circuit for a pulsed gas laser |
Rustem Osmanow, Andreas Targsdorg |
2005-03-01 |
|
| 6822977 |
Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser |
Hans-Stephan Albrecht, Gunter Nowinski |
2004-11-23 |
|
| 6815900 |
Radiation source with high average EUV radiation output |
Imtiaz Ahmad, Juergen Kleinschmidt, Guido Schriever, Sven Goetze |
2004-11-09 |
|
| 6807205 |
Precise monitor etalon calibration technique |
Hans-Stephan Albrecht, Wolfgang Zschocke |
2004-10-19 |
|
| 6785316 |
Excimer or molecular laser with optimized spectral purity |
Igor Bragin, Vadim Berger |
2004-08-31 |
|
| 6757315 |
Corona preionization assembly for a gas laser |
Igor Bragin, Vadim Berger, Ivan Tassy-Julien |
2004-06-29 |
|
| 6717973 |
Wavelength and bandwidth monitor for excimer or molecular fluorine laser |
Dirk Basting, Sergei V. Govorkov, Juergen Kleinschmidt, Peter Lokai |
2004-04-06 |
|
| 6714577 |
Energy stabilized gas discharge laser |
Igor Bragin, Wolfgang Zschocke |
2004-03-30 |
|
| 6650679 |
Preionization arrangement for gas laser |
Igor Bragin, Ulrich Rebhan, Dirk Basting |
2003-11-18 |
|
| 6618403 |
Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser |
Hans-Stephan Albrecht, Guenter Nowinsk |
2003-09-09 |
|
| 6618422 |
Preionization arrangement for a gas laser |
Igor Bragin, Ulrich Rebhan, Dirk Basting |
2003-09-09 |
|
| 6608848 |
Method and apparatus for wavelength calibration |
Jürgen Kleinschmidt, Klaus Vogler, Peter Lokai |
2003-08-19 |
|
| 6603788 |
Resonator for single line selection |
Klaus Vogler |
2003-08-05 |
|
