Issued Patents All Time
Showing 25 most recent of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9632419 | Radiation source | Jan Bernard Plechelmus Van Schoot, Vadim Yevgenyevich Banine, Olav Waldemar Vladimir Frijns, Hermanus Johannes Maria Kreuwel, Johannes Hubertus Josephina Moors +3 more | 2017-04-25 |
| 9110377 | Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method | Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Erik Petrus Buurman | 2015-08-18 |
| 9091944 | Source collector, lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Gerardus Hubertus Petrus Maria Swinkels, Sven Pekelder, Dzmitry Labetski +1 more | 2015-07-28 |
| 8547525 | EUV radiation generation apparatus | Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels | 2013-10-01 |
| 8368040 | Radiation system and lithographic apparatus | Erik Roelof Loopstra, Vladimir Vitalevich Ivanov, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels, Andrei Mikhailovich Yakunin +1 more | 2013-02-05 |
| 7619232 | Method and device for producing extreme ultraviolet radiation or soft X-ray radiation | Martin Schmidt, Rainer Lebert | 2009-11-17 |
| 7266137 | Laser gas replenishment method | Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin +3 more | 2007-09-04 |
| 7075963 | Tunable laser with stabilized grating | Dirk Basting, Wolfgang Zschocke, Thomas Schroeder, Juergen Kleinschmidt, Matthias Kramer | 2006-07-11 |
| 7006541 | Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp | Peter Lokai, Thomas Schroeder, Juergen Kleinschmidt, Klaus Vogler | 2006-02-28 |
| 6965624 | Laser gas replenishment method | Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin +3 more | 2005-11-15 |
| 6894285 | Arrangement for monitoring the energy radiated by an EUV radiation source | Juergen Kleinschmidt | 2005-05-17 |
| 6882704 | Radiation source for generating extreme ultraviolet radiation | Guido Schriever, Kai Gaebel | 2005-04-19 |
| 6862307 | Electrical excitation circuit for a pulsed gas laser | Rustem Osmanow, Andreas Targsdorg | 2005-03-01 |
| 6822977 | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser | Hans-Stephan Albrecht, Gunter Nowinski | 2004-11-23 |
| 6815900 | Radiation source with high average EUV radiation output | Imtiaz Ahmad, Juergen Kleinschmidt, Guido Schriever, Sven Goetze | 2004-11-09 |
| 6807205 | Precise monitor etalon calibration technique | Hans-Stephan Albrecht, Wolfgang Zschocke | 2004-10-19 |
| 6785316 | Excimer or molecular laser with optimized spectral purity | Igor Bragin, Vadim Berger | 2004-08-31 |
| 6757315 | Corona preionization assembly for a gas laser | Igor Bragin, Vadim Berger, Ivan Tassy-Julien | 2004-06-29 |
| 6717973 | Wavelength and bandwidth monitor for excimer or molecular fluorine laser | Dirk Basting, Sergei V. Govorkov, Juergen Kleinschmidt, Peter Lokai | 2004-04-06 |
| 6714577 | Energy stabilized gas discharge laser | Igor Bragin, Wolfgang Zschocke | 2004-03-30 |
| 6650679 | Preionization arrangement for gas laser | Igor Bragin, Ulrich Rebhan, Dirk Basting | 2003-11-18 |
| 6618403 | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser | Hans-Stephan Albrecht, Guenter Nowinsk | 2003-09-09 |
| 6618422 | Preionization arrangement for a gas laser | Igor Bragin, Ulrich Rebhan, Dirk Basting | 2003-09-09 |
| 6608848 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Klaus Vogler, Peter Lokai | 2003-08-19 |
| 6603788 | Resonator for single line selection | Klaus Vogler | 2003-08-05 |