| 7760788 |
Bandwidth-limited and long pulse master oscillator power oscillator laser systems |
Sergei V. Govorkov, Alexander O. W. Wiessner, Timur V. Misyuryaev, Alexander Jacobson, Gongxue Hua +2 more |
2010-07-20 |
| 7418022 |
Bandwidth-limited and long pulse master oscillator power oscillator laser systems |
Sergei V. Govorkov, Alexander O. W. Wiessner, Timur V. Misyuryaev, Alexander Jacobson, Gongxue Hua +2 more |
2008-08-26 |
| 7266137 |
Laser gas replenishment method |
Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin, Vadim Berger +3 more |
2007-09-04 |
| 6965624 |
Laser gas replenishment method |
Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin, Vadim Berger +3 more |
2005-11-15 |
| 6822977 |
Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser |
Uwe Stamm, Gunter Nowinski |
2004-11-23 |
| 6807205 |
Precise monitor etalon calibration technique |
Uwe Stamm, Wolfgang Zschocke |
2004-10-19 |
| 6735225 |
Chirp compensation method and apparatus |
Matthias Kramer, Marcus Serwazi, Thomas Schroeder, Stefan Niedermeier |
2004-05-11 |
| 6618403 |
Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser |
Uwe Stamm, Guenter Nowinsk |
2003-09-09 |
| 6504861 |
Laser gas replenishment method |
Klaus Vogler, Thomas Schroeder |
2003-01-07 |
| 6493370 |
Laser gas replenishment method |
Klaus Vogler, Thomas Schroeder |
2002-12-10 |
| 6490308 |
Laser gas replenishment method |
Klaus Vogler, Thomas Schroeder |
2002-12-03 |
| 6404796 |
Laser resonator for improving narrow band emission of an excimer laser |
Peter Heist, Klaus Wolfgang Volger |
2002-06-11 |
| 6389052 |
Laser gas replenishment method |
Klaus Vogler, Thomas Schroeder |
2002-05-14 |
| 6389048 |
Detector with frequency converting coating |
Uwe Stamm, Uwe Leinhos, Wolfgang Zschocke |
2002-05-14 |
| 6327284 |
Detector with frequency converting coating |
Uwe Stamm, Uwe Leinhos, Wolfgang Zschocke |
2001-12-04 |
| 6285701 |
Laser resonator for improving narrow band emission of an excimer laser |
Peter Heist, Klaus Wolfgang Volger |
2001-09-04 |
| 6160831 |
Wavelength calibration tool for narrow band excimer lasers |
Jürgen Kleinschmidt, Peter Heist |
2000-12-12 |