Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7760788 | Bandwidth-limited and long pulse master oscillator power oscillator laser systems | Sergei V. Govorkov, Alexander O. W. Wiessner, Timur V. Misyuryaev, Alexander Jacobson, Gongxue Hua +2 more | 2010-07-20 |
| 7418022 | Bandwidth-limited and long pulse master oscillator power oscillator laser systems | Sergei V. Govorkov, Alexander O. W. Wiessner, Timur V. Misyuryaev, Alexander Jacobson, Gongxue Hua +2 more | 2008-08-26 |
| 7266137 | Laser gas replenishment method | Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin, Vadim Berger +3 more | 2007-09-04 |
| 6965624 | Laser gas replenishment method | Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin, Vadim Berger +3 more | 2005-11-15 |
| 6822977 | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser | Uwe Stamm, Gunter Nowinski | 2004-11-23 |
| 6807205 | Precise monitor etalon calibration technique | Uwe Stamm, Wolfgang Zschocke | 2004-10-19 |
| 6735225 | Chirp compensation method and apparatus | Matthias Kramer, Marcus Serwazi, Thomas Schroeder, Stefan Niedermeier | 2004-05-11 |
| 6618403 | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser | Uwe Stamm, Guenter Nowinsk | 2003-09-09 |
| 6504861 | Laser gas replenishment method | Klaus Vogler, Thomas Schroeder | 2003-01-07 |
| 6493370 | Laser gas replenishment method | Klaus Vogler, Thomas Schroeder | 2002-12-10 |
| 6490308 | Laser gas replenishment method | Klaus Vogler, Thomas Schroeder | 2002-12-03 |
| 6404796 | Laser resonator for improving narrow band emission of an excimer laser | Peter Heist, Klaus Wolfgang Volger | 2002-06-11 |
| 6389052 | Laser gas replenishment method | Klaus Vogler, Thomas Schroeder | 2002-05-14 |
| 6389048 | Detector with frequency converting coating | Uwe Stamm, Uwe Leinhos, Wolfgang Zschocke | 2002-05-14 |
| 6327284 | Detector with frequency converting coating | Uwe Stamm, Uwe Leinhos, Wolfgang Zschocke | 2001-12-04 |
| 6285701 | Laser resonator for improving narrow band emission of an excimer laser | Peter Heist, Klaus Wolfgang Volger | 2001-09-04 |
| 6160831 | Wavelength calibration tool for narrow band excimer lasers | Jürgen Kleinschmidt, Peter Heist | 2000-12-12 |