| 7266137 |
Laser gas replenishment method |
Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin +3 more |
2007-09-04 |
| 7075963 |
Tunable laser with stabilized grating |
Dirk Basting, Thomas Schroeder, Juergen Kleinschmidt, Matthias Kramer, Uwe Stamm |
2006-07-11 |
| 6965624 |
Laser gas replenishment method |
Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin +3 more |
2005-11-15 |
| 6807205 |
Precise monitor etalon calibration technique |
Hans-Stephan Albrecht, Uwe Stamm |
2004-10-19 |
| 6714577 |
Energy stabilized gas discharge laser |
Uwe Stamm, Igor Bragin |
2004-03-30 |
| 6404795 |
Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines |
Uwe Leinhos, Jürgen Kleinschmidt, Uwe Stamm |
2002-06-11 |
| 6389048 |
Detector with frequency converting coating |
Uwe Stamm, Hans-Stephan Albrecht, Uwe Leinhos |
2002-05-14 |
| 6327284 |
Detector with frequency converting coating |
Uwe Stamm, Hans-Stephan Albrecht, Uwe Leinhos |
2001-12-04 |
| 6269110 |
Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines |
Uwe Leinhos, Jürgen Kleinschmidt, Uwe Stamm |
2001-07-31 |
| 6038240 |
Method and solid-state laser system for generating laser pulses with a variable pulse repetition frequency and constant beam characteristics |
Nils Deutsch, Thomas Schroder, Uwe Stamm |
2000-03-14 |
| 6028870 |
Solid state laser and a method of adjusting the pulse energy of a solid state laser |
Nils Deutsch, Uwe Stamm |
2000-02-22 |
| 5838701 |
Q-switched solid-state laser |
Nils Deutsch, Thomas Schroder, Uwe Stamm |
1998-11-17 |