| 7308013 |
Excimer or molecular fluorine laser system with precision timing |
Sergei V. Govorkov, Rainer Paetzel, Igor Bragin, Andreas Targsdorf |
2007-12-11 |
| 7253905 |
Determination and correction for laser induced CCD camera degradation |
Kai-Uwe Schmidt, Holger Bald, Christian Schramm |
2007-08-07 |
| 7075963 |
Tunable laser with stabilized grating |
Wolfgang Zschocke, Thomas Schroeder, Juergen Kleinschmidt, Matthias Kramer, Uwe Stamm |
2006-07-11 |
| 6717973 |
Wavelength and bandwidth monitor for excimer or molecular fluorine laser |
Sergei V. Govorkov, Juergen Kleinschmidt, Peter Lokai, Uwe Stamm |
2004-04-06 |
| 6650679 |
Preionization arrangement for gas laser |
Igor Bragin, Ulrich Rebhan, Uwe Stamm |
2003-11-18 |
| 6618422 |
Preionization arrangement for a gas laser |
Igor Bragin, Ulrich Rebhan, Uwe Stamm |
2003-09-09 |
| 6614828 |
Wavelength selector for laser with adjustable angular dispersion |
Sergei V. Govorkov |
2003-09-02 |
| 6515741 |
Optical device and method for line-narrowed excimer or molecular fluorine laser |
Sergei V. Govorkov |
2003-02-04 |
| 6426966 |
Molecular fluorine (F2) laser with narrow spectral linewidth |
Sergei V. Govorkov, Uwe Stamm |
2002-07-30 |
| 6393037 |
Wavelength selector for laser with adjustable angular dispersion |
Sergei V. Govorkov |
2002-05-21 |
| 6154470 |
Molecular fluorine (F.sub.2) laser with narrow spectral linewidth |
Sergei V. Govorkov, Uwe Stamm |
2000-11-28 |
| 6061382 |
Laser system and method for narrow spectral linewidth through wavefront curvature compensation |
Sergei V. Govorkov |
2000-05-09 |
| 6014206 |
Stabilization of angular and lateral laser beam position |
Uwe Stamm, Klaus Mann, Jens Ohlenbusch |
2000-01-11 |
| 6005880 |
Precision variable delay using saturable inductors |
Hubertus Von Bergmann |
1999-12-21 |
| 5559816 |
Narrow-band laser apparatus |
Jürgen Kleinschmidt |
1996-09-24 |
| 5430752 |
Apparatus for purifying laser gas |
Gerd Steinfuhrer, Frank Voss |
1995-07-04 |
| 5220574 |
Excimer laser with hydrogen chloride and method for producing hydrogen chloride for an excimer laser |
Frank Voss, A. Meller |
1993-06-15 |
| 5136605 |
Apparatus for purifying laser gas |
Gerd Steinfuhrer, Frank Voss |
1992-08-04 |