Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7006541 | Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp | Thomas Schroeder, Juergen Kleinschmidt, Uwe Stamm, Klaus Vogler | 2006-02-28 |
| 6856638 | Resonator arrangement for bandwidth control | Konstantin Aab, Juergen Kleinschmidt, Matthias Ulrich | 2005-02-15 |
| 6839375 | On-line quality control of the key optical components in lithography lasers using laser induced fluorescence | Farid Seddighi | 2005-01-04 |
| 6792023 | Method and apparatus for reduction of spectral fluctuations | Juergen Kleinschmidt, Konstantin Aab | 2004-09-14 |
| 6717973 | Wavelength and bandwidth monitor for excimer or molecular fluorine laser | Dirk Basting, Sergei V. Govorkov, Juergen Kleinschmidt, Uwe Stamm | 2004-04-06 |
| 6608848 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Uwe Stamm, Klaus Vogler | 2003-08-19 |
| 6580517 | Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp | Thomas Schroeder | 2003-06-17 |
| 6567451 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Juergen Kleinschmidt | 2003-05-20 |
| 6553050 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Juergen Kleinschmidt | 2003-04-22 |
| 6516012 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Juergen Kleinschmidt | 2003-02-04 |
| 6421365 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Juergen Kleinschmidt | 2002-07-16 |
| 6272158 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Uwe Stamm, Klaus Vogler | 2001-08-07 |
| 6160832 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Uwe Stamm, Klaus Vogler | 2000-12-12 |
| 5896220 | Production of narrow-band coherent radiation by using at least one optical parametric oscillator | Uwe Stamm, Ingo Klaft, Stefan Borneis, Vadim Berger | 1999-04-20 |
| 5796513 | Laser arrangement for generating narrow-band, tunable coherent radiation | Uwe Stamm, Peter Genter, Ingo Klaft | 1998-08-18 |
| 5671241 | Tunable source of narrowband coherent radiation | Uwe Stamm | 1997-09-23 |
| 5663973 | Tunable narrowband source of a coherent radiation | Uwe Stamm, Ingo Klaft, Vadim Berger, Stefan Borneis | 1997-09-02 |
| 5661595 | Tunable, optical parametric oscillator | Uwe Stamm, Vadim Berger, Stefan Borneis | 1997-08-26 |
| 5659419 | Tunable narrowband optical parametrical oscillator | Uwe Stamm | 1997-08-19 |
| 4905243 | Method and apparatus for stabilizing the frequency of a laser beam | Heribert Rosenkranz | 1990-02-27 |