| 7006541 |
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp |
Thomas Schroeder, Juergen Kleinschmidt, Uwe Stamm, Klaus Vogler |
2006-02-28 |
| 6856638 |
Resonator arrangement for bandwidth control |
Konstantin Aab, Juergen Kleinschmidt, Matthias Ulrich |
2005-02-15 |
| 6839375 |
On-line quality control of the key optical components in lithography lasers using laser induced fluorescence |
Farid Seddighi |
2005-01-04 |
| 6792023 |
Method and apparatus for reduction of spectral fluctuations |
Juergen Kleinschmidt, Konstantin Aab |
2004-09-14 |
| 6717973 |
Wavelength and bandwidth monitor for excimer or molecular fluorine laser |
Dirk Basting, Sergei V. Govorkov, Juergen Kleinschmidt, Uwe Stamm |
2004-04-06 |
| 6608848 |
Method and apparatus for wavelength calibration |
Jürgen Kleinschmidt, Uwe Stamm, Klaus Vogler |
2003-08-19 |
| 6580517 |
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp |
Thomas Schroeder |
2003-06-17 |
| 6567451 |
Narrow band excimer or molecular fluorine laser having an output coupling interferometer |
Juergen Kleinschmidt |
2003-05-20 |
| 6553050 |
Narrow band excimer or molecular fluorine laser having an output coupling interferometer |
Juergen Kleinschmidt |
2003-04-22 |
| 6516012 |
Narrow band excimer or molecular fluorine laser having an output coupling interferometer |
Juergen Kleinschmidt |
2003-02-04 |
| 6421365 |
Narrow band excimer or molecular fluorine laser having an output coupling interferometer |
Juergen Kleinschmidt |
2002-07-16 |
| 6272158 |
Method and apparatus for wavelength calibration |
Jürgen Kleinschmidt, Uwe Stamm, Klaus Vogler |
2001-08-07 |
| 6160832 |
Method and apparatus for wavelength calibration |
Jürgen Kleinschmidt, Uwe Stamm, Klaus Vogler |
2000-12-12 |
| 5896220 |
Production of narrow-band coherent radiation by using at least one optical parametric oscillator |
Uwe Stamm, Ingo Klaft, Stefan Borneis, Vadim Berger |
1999-04-20 |
| 5796513 |
Laser arrangement for generating narrow-band, tunable coherent radiation |
Uwe Stamm, Peter Genter, Ingo Klaft |
1998-08-18 |
| 5671241 |
Tunable source of narrowband coherent radiation |
Uwe Stamm |
1997-09-23 |
| 5663973 |
Tunable narrowband source of a coherent radiation |
Uwe Stamm, Ingo Klaft, Vadim Berger, Stefan Borneis |
1997-09-02 |
| 5661595 |
Tunable, optical parametric oscillator |
Uwe Stamm, Vadim Berger, Stefan Borneis |
1997-08-26 |
| 5659419 |
Tunable narrowband optical parametrical oscillator |
Uwe Stamm |
1997-08-19 |
| 4905243 |
Method and apparatus for stabilizing the frequency of a laser beam |
Heribert Rosenkranz |
1990-02-27 |