Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6804327 | Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays | Guido Schriever | 2004-10-12 |
| 6735233 | Gas discharge laser with means for removing gas impurities | Rustem Osmanow | 2004-05-11 |
| 6727731 | Energy control for an excimer or molecular fluorine laser | Guenter Nowinski | 2004-04-27 |
| 6650679 | Preionization arrangement for gas laser | Igor Bragin, Uwe Stamm, Dirk Basting | 2003-11-18 |
| 6618422 | Preionization arrangement for a gas laser | Igor Bragin, Uwe Stamm, Dirk Basting | 2003-09-09 |
| 6587202 | Optical materials testing method | — | 2003-07-01 |
| 6556609 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Uwe Stamm | 2003-04-29 |
| 6493364 | Beam shutter for excimer laser | Jurgen Baumler, Markus Ritcher | 2002-12-10 |
| 6466599 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Uwe Stamm | 2002-10-15 |
| 6430205 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Uwe Stamm | 2002-08-06 |
| 6414828 | Laser ventilation system | Kay Zimmerman | 2002-07-02 |
| 6414978 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Uwe Stamm | 2002-07-02 |
| 5347532 | Laser having at least one anode and one cathode for preionization and/or discharge | Frank Voss | 1994-09-13 |
| 5140600 | Method of controlling the total energy amount of a plurality of laser pulses | — | 1992-08-18 |
| 5111473 | Laser gas purifying apparatus | Gerd Steinfuhrer, Frank Voss, Peter Oesterlin | 1992-05-05 |