| 6804327 |
Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays |
Guido Schriever |
2004-10-12 |
| 6735233 |
Gas discharge laser with means for removing gas impurities |
Rustem Osmanow |
2004-05-11 |
| 6727731 |
Energy control for an excimer or molecular fluorine laser |
Guenter Nowinski |
2004-04-27 |
| 6650679 |
Preionization arrangement for gas laser |
Igor Bragin, Uwe Stamm, Dirk Basting |
2003-11-18 |
| 6618422 |
Preionization arrangement for a gas laser |
Igor Bragin, Uwe Stamm, Dirk Basting |
2003-09-09 |
| 6587202 |
Optical materials testing method |
— |
2003-07-01 |
| 6556609 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Igor Bragin, Vadim Berger, Uwe Stamm |
2003-04-29 |
| 6493364 |
Beam shutter for excimer laser |
Jurgen Baumler, Markus Ritcher |
2002-12-10 |
| 6466599 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Igor Bragin, Vadim Berger, Uwe Stamm |
2002-10-15 |
| 6430205 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Igor Bragin, Vadim Berger, Uwe Stamm |
2002-08-06 |
| 6414828 |
Laser ventilation system |
Kay Zimmerman |
2002-07-02 |
| 6414978 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Igor Bragin, Vadim Berger, Uwe Stamm |
2002-07-02 |
| 5347532 |
Laser having at least one anode and one cathode for preionization and/or discharge |
Frank Voss |
1994-09-13 |
| 5140600 |
Method of controlling the total energy amount of a plurality of laser pulses |
— |
1992-08-18 |
| 5111473 |
Laser gas purifying apparatus |
Gerd Steinfuhrer, Frank Voss, Peter Oesterlin |
1992-05-05 |