| 11183808 |
Excimer laser with uniform beam |
Timur V. Misyuryaev, Paul Van Der Wilt |
2021-11-23 |
|
| 10234765 |
Energy controller for excimer-laser silicon crystallization |
— |
2019-03-19 |
|
| 10069273 |
Lasing-gas mixture for excimer laser |
Oleg Melnikov, Timur V. Misyuryaev |
2018-09-04 |
|
| 9767958 |
Capacitor assembly |
— |
2017-09-19 |
|
| 8192790 |
Electrodes for generating a stable discharge in gas laser systems |
Rustem Osmanow, Jurgen Baumler, Michael Semling |
2012-06-05 |
$7,214,000 |
| 7804879 |
Gas laser electrodes shaped in the longitudinal axis |
Vadim Berger |
2010-09-28 |
$6,519,000 |
| 7756184 |
Electrodes for generating a stable discharge in gas laser system |
Rustem Osmanow, Jurgen Baumler, Michael Semling |
2010-07-13 |
$1,530,000 |
| 7308013 |
Excimer or molecular fluorine laser system with precision timing |
Dirk Basting, Sergei V. Govorkov, Rainer Paetzel, Andreas Targsdorf |
2007-12-11 |
|
| 7266137 |
Laser gas replenishment method |
Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Vadim Berger +3 more |
2007-09-04 |
|
| 7158553 |
Master oscillator/power amplifier excimer laser system with pulse energy and pointing control |
Sergei V. Govorkov, Alexander Wiessner, Rainer Paetzel |
2007-01-02 |
|
| 7079565 |
Systems and methods utilizing laser discharge electrodes with ceramic spoilers |
Vadim Berger, Oleg Melnikov, Konstantin Aab, Juergen Baumler |
2006-07-18 |
|
| 6987790 |
Excimer or molecular fluorine laser with several discharge chambers |
Sergei V. Govorkov, Rainer Paetzel, Rainer Desor, Andreas Targsdorf, Andriy Knysh |
2006-01-17 |
|
| 6965624 |
Laser gas replenishment method |
Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Vadim Berger +3 more |
2005-11-15 |
|
| 6834066 |
Stabilization technique for high repetition rate gas discharge lasers |
Vadim Berger, Juergen Kleinschmidt |
2004-12-21 |
|
| 6785316 |
Excimer or molecular laser with optimized spectral purity |
Vadim Berger, Uwe Stamm |
2004-08-31 |
|
| 6757315 |
Corona preionization assembly for a gas laser |
Vadim Berger, Ivan Tassy-Julien, Uwe Stamm |
2004-06-29 |
|
| 6721345 |
Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers |
Juergen Kleinschmidt, Gerhard Ahlborn |
2004-04-13 |
|
| 6714577 |
Energy stabilized gas discharge laser |
Uwe Stamm, Wolfgang Zschocke |
2004-03-30 |
|
| 6650679 |
Preionization arrangement for gas laser |
Ulrich Rebhan, Uwe Stamm, Dirk Basting |
2003-11-18 |
|
| 6618422 |
Preionization arrangement for a gas laser |
Ulrich Rebhan, Uwe Stamm, Dirk Basting |
2003-09-09 |
|
| 6570901 |
Excimer or molecular fluorine laser having lengthened electrodes |
Uwe Stamm, Juergen Kleinschmidt |
2003-05-27 |
|
| 6556609 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Vadim Berger, Uwe Stamm, Ulrich Rebhan |
2003-04-29 |
|
| 6546036 |
Roof configuration for laser discharge electrodes |
Vadim Berger |
2003-04-08 |
|
| 6466599 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Vadim Berger, Uwe Stamm, Ulrich Rebhan |
2002-10-15 |
|
| 6430205 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Vadim Berger, Uwe Stamm, Ulrich Rebhan |
2002-08-06 |
|