Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183808 | Excimer laser with uniform beam | Timur V. Misyuryaev, Paul Van Der Wilt | 2021-11-23 |
| 10234765 | Energy controller for excimer-laser silicon crystallization | — | 2019-03-19 |
| 10069273 | Lasing-gas mixture for excimer laser | Oleg Melnikov, Timur V. Misyuryaev | 2018-09-04 |
| 9767958 | Capacitor assembly | — | 2017-09-19 |
| 8192790 | Electrodes for generating a stable discharge in gas laser systems | Rustem Osmanow, Jurgen Baumler, Michael Semling | 2012-06-05 |
| 7804879 | Gas laser electrodes shaped in the longitudinal axis | Vadim Berger | 2010-09-28 |
| 7756184 | Electrodes for generating a stable discharge in gas laser system | Rustem Osmanow, Jurgen Baumler, Michael Semling | 2010-07-13 |
| 7308013 | Excimer or molecular fluorine laser system with precision timing | Dirk Basting, Sergei V. Govorkov, Rainer Paetzel, Andreas Targsdorf | 2007-12-11 |
| 7266137 | Laser gas replenishment method | Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Vadim Berger +3 more | 2007-09-04 |
| 7158553 | Master oscillator/power amplifier excimer laser system with pulse energy and pointing control | Sergei V. Govorkov, Alexander Wiessner, Rainer Paetzel | 2007-01-02 |
| 7079565 | Systems and methods utilizing laser discharge electrodes with ceramic spoilers | Vadim Berger, Oleg Melnikov, Konstantin Aab, Juergen Baumler | 2006-07-18 |
| 6987790 | Excimer or molecular fluorine laser with several discharge chambers | Sergei V. Govorkov, Rainer Paetzel, Rainer Desor, Andreas Targsdorf, Andriy Knysh | 2006-01-17 |
| 6965624 | Laser gas replenishment method | Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Vadim Berger +3 more | 2005-11-15 |
| 6834066 | Stabilization technique for high repetition rate gas discharge lasers | Vadim Berger, Juergen Kleinschmidt | 2004-12-21 |
| 6785316 | Excimer or molecular laser with optimized spectral purity | Vadim Berger, Uwe Stamm | 2004-08-31 |
| 6757315 | Corona preionization assembly for a gas laser | Vadim Berger, Ivan Tassy-Julien, Uwe Stamm | 2004-06-29 |
| 6721345 | Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers | Juergen Kleinschmidt, Gerhard Ahlborn | 2004-04-13 |
| 6714577 | Energy stabilized gas discharge laser | Uwe Stamm, Wolfgang Zschocke | 2004-03-30 |
| 6650679 | Preionization arrangement for gas laser | Ulrich Rebhan, Uwe Stamm, Dirk Basting | 2003-11-18 |
| 6618422 | Preionization arrangement for a gas laser | Ulrich Rebhan, Uwe Stamm, Dirk Basting | 2003-09-09 |
| 6570901 | Excimer or molecular fluorine laser having lengthened electrodes | Uwe Stamm, Juergen Kleinschmidt | 2003-05-27 |
| 6556609 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Vadim Berger, Uwe Stamm, Ulrich Rebhan | 2003-04-29 |
| 6546036 | Roof configuration for laser discharge electrodes | Vadim Berger | 2003-04-08 |
| 6466599 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Vadim Berger, Uwe Stamm, Ulrich Rebhan | 2002-10-15 |
| 6430205 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Vadim Berger, Uwe Stamm, Ulrich Rebhan | 2002-08-06 |