Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7366213 | MOPA excimer or molecular fluorine laser system with improved synchronization | Sergei V. Govorkov, Alexander Wiessner | 2008-04-29 |
| 6987790 | Excimer or molecular fluorine laser with several discharge chambers | Sergei V. Govorkov, Rainer Paetzel, Igor Bragin, Rainer Desor, Andreas Targsdorf | 2006-01-17 |