Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9945733 | Temperature measurement at high-voltage potential | Michael Willsch | 2018-04-17 |
| 6493364 | Beam shutter for excimer laser | Jurgen Baumler, Ulrich Rebhan | 2002-12-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9945733 | Temperature measurement at high-voltage potential | Michael Willsch | 2018-04-17 |
| 6493364 | Beam shutter for excimer laser | Jurgen Baumler, Ulrich Rebhan | 2002-12-10 |