Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8610354 | Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current discharge | Max Christian Schuermann, Lutz Dippmann, Juergen Kleinschmidt | 2013-12-17 |
| 8410422 | Method and arrangement for the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma | Denis Bolshukhin, Alexander Keller, Max Christian Schuermann, Imtiaz Ahmad, Juergen Kleinschmidt | 2013-04-02 |
| 8147647 | Method and arrangement for cleaning optical surfaces in plasma-based radiation sources | — | 2012-04-03 |
| 6998620 | Stable energy detector for extreme ultraviolet radiation detection | — | 2006-02-14 |
| 6894298 | Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge | Imtiaz Ahmad, Juergen Kleinschmidt | 2005-05-17 |
| 6882704 | Radiation source for generating extreme ultraviolet radiation | Kai Gaebel, Uwe Stamm | 2005-04-19 |
| 6855932 | Detector arrangement for energy measurement of pulsed x-ray radiation | Juergen Kleinschmidt | 2005-02-15 |
| 6815900 | Radiation source with high average EUV radiation output | Imtiaz Ahmad, Juergen Kleinschmidt, Uwe Stamm, Sven Goetze | 2004-11-09 |
| 6804327 | Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays | Ulrich Rebhan | 2004-10-12 |
| 6770896 | Method for generating extreme ultraviolet radiation based on a radiation-emitting plasma | — | 2004-08-03 |
| 6389106 | Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge | Willi Neff, Rainer Lebert, Klaus Bergmann | 2002-05-14 |