Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7541604 | Arrangement for the generation of short-wavelength radiation based on a gas discharge plasma and method for the production of coolant-carrying electrode housings | Harald Ebel, Juergen Kleinschmidt, Imtiaz Ahmad | 2009-06-02 |
| 6815900 | Radiation source with high average EUV radiation output | Imtiaz Ahmad, Juergen Kleinschmidt, Guido Schriever, Uwe Stamm | 2004-11-09 |