Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624424 | VUV laser beam characterization system | Gerd Eckert, Klaus Vogler | 2003-09-23 |
| 6389045 | Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers | Thomas Schroder, Bernd Schafer, Uwe Leinhos, Uwe Stamm | 2002-05-14 |
| 6014206 | Stabilization of angular and lateral laser beam position | Dirk Basting, Uwe Stamm, Jens Ohlenbusch | 2000-01-11 |