Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6404795 | Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines | Jürgen Kleinschmidt, Wolfgang Zschocke, Uwe Stamm | 2002-06-11 |
| 6389045 | Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers | Klaus Mann, Thomas Schroder, Bernd Schafer, Uwe Stamm | 2002-05-14 |
| 6389048 | Detector with frequency converting coating | Uwe Stamm, Hans-Stephan Albrecht, Wolfgang Zschocke | 2002-05-14 |
| 6327284 | Detector with frequency converting coating | Uwe Stamm, Hans-Stephan Albrecht, Wolfgang Zschocke | 2001-12-04 |
| 6269110 | Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines | Jürgen Kleinschmidt, Wolfgang Zschocke, Uwe Stamm | 2001-07-31 |