| 6760358 |
Line-narrowing optics module having improved mechanical performance |
Kay Zimmermann, Konstantin Aab, Matthias Kramer |
2004-07-06 |
| 6735225 |
Chirp compensation method and apparatus |
Hans-Stephan Albrecht, Matthias Kramer, Thomas Schroeder, Stefan Niedermeier |
2004-05-11 |
| 6700916 |
E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems |
Matthias Kramer, Gunter Nowinski, Juergen Kleinschmidt |
2004-03-02 |
| 6597462 |
Laser wavelength and bandwidth monitor |
Matthias Kramer |
2003-07-22 |
| 6563853 |
Gas performance control system for gas discharge lasers |
Peter Heist, Matthias Kramer, Juergen Kleinschmidt, Sergei V. Govorkov, Thomas Jünemann |
2003-05-13 |
| 6549555 |
Gas performance control system for gas discharge lasers |
Thomas Jünemann |
2003-04-15 |