| 7573930 |
Anamorphotic solid-sate laser |
Günter Hollemann, Peter Oesterlin, Berthold Burghardt, Hans-Jurgen Kahlert, Klaus Brunwinkel +3 more |
2009-08-11 |
| 7463658 |
Laser and method for generating pulsed laser radiation |
Guenter Hollemann, Adolf Giesen, Christian Stolzenburg |
2008-12-09 |
| 6563853 |
Gas performance control system for gas discharge lasers |
Matthias Kramer, Juergen Kleinschmidt, Sergei V. Govorkov, Marcus Serwazi, Thomas Jünemann |
2003-05-13 |
| 6556613 |
F2-laser with line selection |
Jürgen Kleinschmidt, Frank Voss, Andreas Görtler |
2003-04-29 |
| RE38039 |
Laser for generating narrow-band radiation |
Jürgen Kleinschmidt |
2003-03-18 |
| 6526085 |
Performance control system and method for gas discharge lasers |
Klaus Vogler |
2003-02-25 |
| 6498803 |
Narrow band excimer or molecular fluorine laser with adjustable bandwidth |
Jürgen Kleinschmidt |
2002-12-24 |
| 6487228 |
Narrow band excimer or molecular fluorine laser with adjustable bandwidth |
Jürgen Kleinschmidt |
2002-11-26 |
| 6477187 |
F2-laser with line selection |
Jürgen Kleinschmidt, Frank Voss, Andreas Görtler |
2002-11-05 |
| 6476987 |
Excimer laser with line narrowing |
Juergen Kleinschmidt, Matthias Kramer |
2002-11-05 |
| 6466598 |
F2-laser with line selection |
Jürgen Kleinschmidt, Frank Voss, Andreas Görtler |
2002-10-15 |
| 6459720 |
Excimer laser |
Jürgen Kleinschmidt, Frank Voss, Andreas Görtler |
2002-10-01 |
| 6404796 |
Laser resonator for improving narrow band emission of an excimer laser |
Hans-Stephan Albrecht, Klaus Wolfgang Volger |
2002-06-11 |
| 6345065 |
F2-laser with line selection |
Jürgen Kleinschmidt, Frank Voss, Andreas Görtler |
2002-02-05 |
| 6330267 |
Performance control system and method for gas discharge lasers |
Klaus Vogler |
2001-12-11 |
| 6298080 |
Narrow band excimer or molecular fluorine laser with adjustable bandwidth |
Jürgen Kleinschmidt |
2001-10-02 |
| 6285701 |
Laser resonator for improving narrow band emission of an excimer laser |
Hans-Stephan Albrecht, Klaus Wolfgang Volger |
2001-09-04 |
| 6243406 |
Gas performance control system for gas discharge lasers |
Matthias Kramer, Jürgen Kleinschmidt, Sergei V. Govorkov |
2001-06-05 |
| 6212214 |
Performance control system and method for gas discharge lasers |
Klaus Vogler |
2001-04-03 |
| 6160831 |
Wavelength calibration tool for narrow band excimer lasers |
Jürgen Kleinschmidt, Hans-Stephan Albrecht |
2000-12-12 |
| 5761236 |
Laser for generating narrow-band radiation |
Jürgen Kleinschmidt |
1998-06-02 |