Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6570901 | Excimer or molecular fluorine laser having lengthened electrodes | Juergen Kleinschmidt, Igor Bragin | 2003-05-27 |
| 6560254 | Line-narrowing module for high power laser | — | 2003-05-06 |
| 6556609 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Ulrich Rebhan | 2003-04-29 |
| 6546037 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Sergei V. Govorkov | 2003-04-08 |
| 6516013 | Laser beam monitoring apparatus and method | Rainer Patzel | 2003-02-04 |
| 6490307 | Method and procedure to automatically stabilize excimer laser output parameters | Bruno Becker de Mos, Klaus Vogler | 2002-12-03 |
| 6490306 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Sergei V. Govorkov | 2002-12-03 |
| 6466599 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Ulrich Rebhan | 2002-10-15 |
| 6463086 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Sergei V. Govorkov | 2002-10-08 |
| 6456643 | Surface preionization for gas lasers | Rustem Osmanow | 2002-09-24 |
| 6430205 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Ulrich Rebhan | 2002-08-06 |
| 6426966 | Molecular fluorine (F2) laser with narrow spectral linewidth | Dirk Basting, Sergei V. Govorkov | 2002-07-30 |
| 6424666 | Line-narrowing module for high power laser | — | 2002-07-23 |
| 6414978 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Ulrich Rebhan | 2002-07-02 |
| 6404795 | Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines | Uwe Leinhos, Jürgen Kleinschmidt, Wolfgang Zschocke | 2002-06-11 |
| 6393040 | Molecular fluorine (F2) excimer laser with reduced coherence length | Sergei V. Govorkov | 2002-05-21 |
| 6389048 | Detector with frequency converting coating | Hans-Stephan Albrecht, Uwe Leinhos, Wolfgang Zschocke | 2002-05-14 |
| 6389045 | Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers | Klaus Mann, Thomas Schroder, Bernd Schafer, Uwe Leinhos | 2002-05-14 |
| 6381256 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Sergei V. Govorkov | 2002-04-30 |
| 6327284 | Detector with frequency converting coating | Hans-Stephan Albrecht, Uwe Leinhos, Wolfgang Zschocke | 2001-12-04 |
| 6272158 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Klaus Vogler, Peter Lokai | 2001-08-07 |
| 6269110 | Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines | Uwe Leinhos, Jürgen Kleinschmidt, Wolfgang Zschocke | 2001-07-31 |
| 6243405 | Very stable excimer or molecular fluorine laser | Stefan Borneis, Klaus Brunwinkel, Frank Voss | 2001-06-05 |
| 6160832 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Klaus Vogler, Peter Lokai | 2000-12-12 |
| 6154470 | Molecular fluorine (F.sub.2) laser with narrow spectral linewidth | Dirk Basting, Sergei V. Govorkov | 2000-11-28 |