Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6516013 | Laser beam monitoring apparatus and method | Uwe Stamm | 2003-02-04 |
| 6490305 | Beam delivery system for molecular fluorine (F2) laser | Sergei V. Govorkov, Klaus Vogler, Frank Voss | 2002-12-03 |
| 6487229 | Beam delivery system for molecular fluorine (F2) laser | Sergei V. Govorkov, Klaus Vogler, Frank Voss | 2002-11-26 |
| 6327290 | Beam delivery system for molecular fluorine (F2) laser | Sergei V. Govorkov, Klaus Vogler, Frank Voss | 2001-12-04 |