Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8639071 | Device for forming laser radiation | Andreas Bayer, Udo Fornahl, Jens Meinschien, Thomas Mitra | 2014-01-28 |
| 8416500 | Device and method for beam forming | Thomas Mitra, Daniel Bartoschewski | 2013-04-09 |
| 7517617 | Mask blank for use in EUV lithography and method for its production | Markus Renno, Mario Schiffler, Frank Sobel, Hans Becker | 2009-04-14 |
| 7279252 | Substrate for the micro-lithography and process of manufacturing thereof | Markus Schweizer, Jochen Alkemper, Axel Schindler, Frank Frost, Thomas Haensel +1 more | 2007-10-09 |
| 7129010 | Substrates for in particular microlithography | Jochen Alkemper, Hrabanus Hack | 2006-10-31 |
| 6856395 | Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent manner | Rainer Lebert, Ulf Heim, Larissa Juschkin | 2005-02-15 |