Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7517617 | Mask blank for use in EUV lithography and method for its production | Lutz Aschke, Mario Schiffler, Frank Sobel, Hans Becker | 2009-04-14 | |
| 7029803 | Attenuating phase shift mask blank and photomask | Hans Becker, Ute Buttgereit, Gunter Hess, Oliver Goetzberger, Frank Schmidt +2 more | 2006-04-18 | $9,074,000 |