Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7029803 | Attenuating phase shift mask blank and photomask | Hans Becker, Ute Buttgereit, Gunter Hess, Frank Schmidt, Frank Sobel +2 more | 2006-04-18 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7029803 | Attenuating phase shift mask blank and photomask | Hans Becker, Ute Buttgereit, Gunter Hess, Frank Schmidt, Frank Sobel +2 more | 2006-04-18 |