Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7279252 | Substrate for the micro-lithography and process of manufacturing thereof | Lutz Aschke, Jochen Alkemper, Axel Schindler, Frank Frost, Thomas Haensel +1 more | 2007-10-09 |
| 7255740 | Method of growing hexagonal single crystals and use of same as substrates for semiconductor elements | Dirk Sprenger, Burkhard Speit | 2007-08-14 |