Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326407 | Inspection apparatus and inspection method | Nitish Kumar, Richard Quintanilha, Markus Gerardus Martinus Maria Van Kraaij, Willem Marie Julia Marcel Coene | 2025-06-10 |
| 11692948 | Inspection apparatus and inspection method | Nitish Kumar, Richard Quintanilha, Markus Gerardus Martinus Maria Van Kraaij, Willem Marie Julia Marcel Coene | 2023-07-04 |
| 11635700 | Method and apparatus for EUV mask inspection | Erel Milshtein, Alexander N. Bykanov, Lauren Wilson, Lubomyr Kucher, Brian Ahr +4 more | 2023-04-25 |
| 11499924 | Determining one or more characteristics of light in an optical system | Larissa Juschkin | 2022-11-15 |
| 11293880 | Method and apparatus for beam stabilization and reference correction for EUV inspection | Larissa Juschkin, Debashis De Munshi | 2022-04-05 |
| 9544984 | System and method for generation of extreme ultraviolet light | Alexander N. Bykanov, Oleg Khodykin, Daniel Wack, Layton Hale, Joseph F. Walsh +3 more | 2017-01-10 |
| 8767291 | Suppression of parasitic optical feedback in pulse laser systems | — | 2014-07-01 |