Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11878185 | High bandwidth binary multi-leaf collimator design | Eugene P. Duval, David Meer, David Q. Larkin | 2024-01-23 |
| 11343899 | Droplet generation for a laser produced plasma light source | Brian Ahr, Alexander N. Bykanov, Rudy F. Garcia, Oleg Khodykin | 2022-05-24 |
| 11285340 | High bandwidth binary multi-leaf collimator design | David Q. Larkin, William Knapp | 2022-03-29 |
| 10880979 | Droplet generation for a laser produced plasma light source | Brian Ahr, Alexander N. Bykanov, Rudy F. Garcia, Oleg Khodykin | 2020-12-29 |
| 10500416 | High bandwidth binary multi-leaf collimator design | David Q. Larkin, William Knapp, David Meer | 2019-12-10 |
| 9690213 | Linear Stage for reflective electron beam lithography | Upendra Ummethala, Joshua Randall Clyne, Samir Nayfeh, Mark Williams, Joseph A. Di Regolo +1 more | 2017-06-27 |
| 9544984 | System and method for generation of extreme ultraviolet light | Alexander N. Bykanov, Oleg Khodykin, Daniel Wack, Konstantin Tsigutkin, Joseph F. Walsh +3 more | 2017-01-10 |
| 9298106 | Wafer stage with reciprocating wafer stage actuation control | Upendra Ummethala, Marek Zywno | 2016-03-29 |
| 8963110 | Continuous generation of extreme ultraviolet light | Francis Chilese, Qiang Zhang | 2015-02-24 |
| 8724115 | Linear stage and metrology architecture for reflective electron beam lithography | Upendra Ummethala, Josh Clyne, Samir Nayfeh, Mark Williams, Joseph A. DiRegolo +1 more | 2014-05-13 |
| 6325351 | Highly damped kinematic coupling for precision instruments | Steven A. Jensen | 2001-12-04 |
| 6206966 | Pedestal substrate for coated optics | Terry N. Malsbury, Steven R. Patterson | 2001-03-27 |
| 6147818 | Projection optics box | Terry N. Malsbury, Russell Hudyma, John M. Parker | 2000-11-14 |
| 6065898 | Three tooth kinematic coupling | — | 2000-05-23 |
| 5986827 | Precision tip-tilt-piston actuator that provides exact constraint | — | 1999-11-16 |
| 5642956 | Adjustable link for kinematic mounting systems | — | 1997-07-01 |