Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12432461 | Smart camera substrate | Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2025-09-30 |
| 12283503 | Substrate measurement subsystem | Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2025-04-22 |
| 12211670 | Performing radio frequency matching control using a model-based digital twin | Tao Zhang | 2025-01-28 |
| 12191176 | Integrated substrate measurement system to improve manufacturing process performance | Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2025-01-07 |
| 12114083 | Smart camera substrate | Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2024-10-08 |
| 12066639 | Adjustable achromatic collimator assembly for endpoint detection systems | Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Lei Lian, Michael Kutney | 2024-08-20 |
| 11808746 | Concentration sensor for precursor delivery system | Vivek Shah, Varoujan Chakarian | 2023-11-07 |
| 11784028 | Performing radio frequency matching control using a model-based digital twin | Tao Zhang | 2023-10-10 |
| 11736818 | Smart camera substrate | Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2023-08-22 |
| 11735401 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Steven E. Babayan, Lei Lian | 2023-08-22 |
| 11719952 | Adjustable achromatic collimator assembly for endpoint detection systems | Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Lei Lian, Michael Kutney | 2023-08-08 |
| 11693053 | Bode fingerprinting for characterizations and failure detections in processing chamber | Tao Zhang, Ajit Balakrishna | 2023-07-04 |
| 11688616 | Integrated substrate measurement system to improve manufacturing process performance | Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2023-06-27 |
| D977504 | Portion of a display panel with a graphical user interface | Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2023-02-07 |
| 11499869 | Optical wall and process sensor with plasma facing sensor | Chuang-Chia Lin | 2022-11-15 |
| 11486927 | Bode fingerprinting for characterizations and failure detections in processing chamber | Tao Zhang, Ajit Balakrishna | 2022-11-01 |
| 11346875 | Micro resonator array sensor for detecting wafer processing parameters | Chuang-Chia Lin | 2022-05-31 |
| 11289387 | Methods and apparatus for backside via reveal processing | Prayudi Lianto, Sik Hin Chi, SHIH-CHAO HUNG, Pin Gian Gan, Ricardo Fujii Vinluan +10 more | 2022-03-29 |
| 11284018 | Smart camera substrate | Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2022-03-22 |
| 11209398 | High quality factor embedded resonator wafers | Chuang-Chia Lin, Surajit Kumar | 2021-12-28 |
| 11114286 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Steven E. Babayan, Lei Lian | 2021-09-07 |
| 11009538 | Micro resonator array system | Chuang-Chia Lin, Andrew Kunil Choe | 2021-05-18 |
| 10901021 | Method for detecting wafer processing parameters with micro resonator array sensors | Chuang-Chia Lin | 2021-01-26 |
| 10663482 | Accelerometer leveling in an actively controlled vehicle suspension | David J. Warkentin | 2020-05-26 |
| 9952253 | Accelerometer leveling in an actively controlled vehicle suspension | David J. Warkentin | 2018-04-24 |