| 12510878 |
Physically-informed multi-system hardware operating windows |
Jeong Hee Hong, Mi Hyun Jang, Sidharth Bhatia, Se-Eun Cheon, Joshua Maher |
2025-12-30 |
|
| 12504726 |
Determining equipment constant updates by machine learning |
Sidharth Bhatia, Roger Alan Lindley, Thaddeus Siu-Por Li, Michael Howells, Steven E. Babayan +1 more |
2025-12-23 |
|
| 12498705 |
Chamber matching by equipment constant updates |
Sidharth Bhatia, Roger Alan Lindley, Thaddeus Siu-Por Li, Michael Howells, Steven E. Babayan +1 more |
2025-12-16 |
|
| 12432461 |
Smart camera substrate |
Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2025-09-30 |
|
| 12283503 |
Substrate measurement subsystem |
Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2025-04-22 |
|
| 12211670 |
Performing radio frequency matching control using a model-based digital twin |
Tao Zhang |
2025-01-28 |
|
| 12191176 |
Integrated substrate measurement system to improve manufacturing process performance |
Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2025-01-07 |
|
| 12114083 |
Smart camera substrate |
Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2024-10-08 |
$69,128,000 |
| 12066639 |
Adjustable achromatic collimator assembly for endpoint detection systems |
Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Lei Lian, Michael Kutney |
2024-08-20 |
$94,413,000 |
| 11808746 |
Concentration sensor for precursor delivery system |
Vivek Shah, Varoujan Chakarian |
2023-11-07 |
$37,048,000 |
| 11784028 |
Performing radio frequency matching control using a model-based digital twin |
Tao Zhang |
2023-10-10 |
$39,034,000 |
| 11735401 |
In-situ optical chamber surface and process sensor |
Chuang-Chia Lin, Steven E. Babayan, Lei Lian |
2023-08-22 |
$40,609,000 |
| 11736818 |
Smart camera substrate |
Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2023-08-22 |
$40,609,000 |
| 11719952 |
Adjustable achromatic collimator assembly for endpoint detection systems |
Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Lei Lian, Michael Kutney |
2023-08-08 |
$46,911,000 |
| 11693053 |
Bode fingerprinting for characterizations and failure detections in processing chamber |
Tao Zhang, Ajit Balakrishna |
2023-07-04 |
|
| 11688616 |
Integrated substrate measurement system to improve manufacturing process performance |
Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2023-06-27 |
$59,089,000 |
| D977504 |
Portion of a display panel with a graphical user interface |
Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2023-02-07 |
|
| 11499869 |
Optical wall and process sensor with plasma facing sensor |
Chuang-Chia Lin |
2022-11-15 |
$47,599,000 |
| 11486927 |
Bode fingerprinting for characterizations and failure detections in processing chamber |
Tao Zhang, Ajit Balakrishna |
2022-11-01 |
$32,150,000 |
| 11346875 |
Micro resonator array sensor for detecting wafer processing parameters |
Chuang-Chia Lin |
2022-05-31 |
$62,587,000 |
| 11289387 |
Methods and apparatus for backside via reveal processing |
Prayudi Lianto, Sik Hin Chi, SHIH-CHAO HUNG, Pin Gian Gan, Ricardo Fujii Vinluan +10 more |
2022-03-29 |
$46,373,000 |
| 11284018 |
Smart camera substrate |
Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2022-03-22 |
$64,102,000 |
| 11209398 |
High quality factor embedded resonator wafers |
Chuang-Chia Lin, Surajit Kumar |
2021-12-28 |
$93,125,000 |
| 11114286 |
In-situ optical chamber surface and process sensor |
Chuang-Chia Lin, Steven E. Babayan, Lei Lian |
2021-09-07 |
$49,370,000 |
| 11009538 |
Micro resonator array system |
Chuang-Chia Lin, Andrew Kunil Choe |
2021-05-18 |
$51,490,000 |
