Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385803 | Endpoint detection system for enhanced spectral data collection | Pengyu Han | 2025-08-12 |
| 12265377 | Autonomous substrate processing system | Priyadarshi Panda, Pengyu Han, Todd Egan, Prashant Aji, Eli Mor +2 more | 2025-04-01 |
| 12237158 | Etch feedback for control of upstream process | Priyadarshi Panda, Leonard Tedeschi | 2025-02-25 |
| 12078547 | Etalon thermometry for plasma environments | Bruce E. Adams, Samuel C. Howells, Alvaro Garcia, Barry Craver, Tony Jefferson GNANAPRAKASA | 2024-09-03 |
| 12066639 | Adjustable achromatic collimator assembly for endpoint detection systems | Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Upendra Ummethala, Michael Kutney | 2024-08-20 |
| 12046522 | Endpoint detection in low open area and/or high aspect ratio etch applications | Quentin Ernie Walker, Zefang WANG, Shinichi Koseki | 2024-07-23 |
| 11965798 | Endpoint detection system for enhanced spectral data collection | Pengyu Han | 2024-04-23 |
| 11901203 | Substrate process endpoint detection using machine learning | Pengyu Han, Shu-Yu Chen, Todd Egan, Wan Hsueh Lai, Chao-Hsien Lee +3 more | 2024-02-13 |
| 11735401 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan | 2023-08-22 |
| 11719952 | Adjustable achromatic collimator assembly for endpoint detection systems | Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Upendra Ummethala, Michael Kutney | 2023-08-08 |
| 11709477 | Autonomous substrate processing system | Priyadarshi Panda, Pengyu Han, Todd Egan, Prashant Aji, Eli Mor +2 more | 2023-07-25 |
| 11421977 | Eliminating internal reflections in an interferometric endpoint detection system | Pengyu Han | 2022-08-23 |
| 11114286 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan | 2021-09-07 |
| 9601396 | 3D NAND staircase CD control by using interferometric endpoint detection | — | 2017-03-21 |
| 9240359 | 3D NAND staircase CD control by using interferometric endpoint detection | — | 2016-01-19 |
| 9200950 | Pulsed plasma monitoring using optical sensor and a signal analyzer forming a mean waveform | Quentin Ernie Walker, Dermot Cantwell | 2015-12-01 |
| 8956886 | Embedded test structure for trimming process control | Samer Banna, Olivier Joubert, Maxime Darnon, Nicolas Posseme, Laurent Vallier | 2015-02-17 |
| 8274645 | Method and apparatus for in-situ metrology of a workpiece disposed in a vacuum processing chamber | Matthew F. Davis, Thorsten Lill | 2012-09-25 |
| 8257546 | Method and system for monitoring an etch process | Matthew F. Davis, John M. Yamartino | 2012-09-04 |
| 8232212 | Within-sequence metrology based process tuning for adaptive self-aligned double patterning | Matthew F. Davis, Thorsten Lill | 2012-07-31 |
| 8130382 | Determining endpoint in a substrate process | Matthew F. Davis | 2012-03-06 |
| 8009938 | Advanced process sensing and control using near infrared spectral reflectometry | Matthew F. Davis | 2011-08-30 |
| 7969581 | Determining endpoint in a substrate process | Matthew F. Davis | 2011-06-28 |
| 7815812 | Method for controlling a process for fabricating integrated devices | Matthew F. Davis, Barbara Schmidt | 2010-10-19 |
| 7808651 | Determining endpoint in a substrate process | Matthew F. Davis | 2010-10-05 |