| 12385803 |
Endpoint detection system for enhanced spectral data collection |
Pengyu Han |
2025-08-12 |
|
| 12265377 |
Autonomous substrate processing system |
Priyadarshi Panda, Pengyu Han, Todd Egan, Prashant Aji, Eli Mor +2 more |
2025-04-01 |
|
| 12237158 |
Etch feedback for control of upstream process |
Priyadarshi Panda, Leonard Tedeschi |
2025-02-25 |
|
| 12078547 |
Etalon thermometry for plasma environments |
Bruce E. Adams, Samuel C. Howells, Alvaro Garcia, Barry Craver, Tony Jefferson GNANAPRAKASA |
2024-09-03 |
$44,731,000 |
| 12066639 |
Adjustable achromatic collimator assembly for endpoint detection systems |
Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Upendra Ummethala, Michael Kutney |
2024-08-20 |
$94,413,000 |
| 12046522 |
Endpoint detection in low open area and/or high aspect ratio etch applications |
Quentin Ernie Walker, Zefang WANG, Shinichi Koseki |
2024-07-23 |
$84,339,000 |
| 11965798 |
Endpoint detection system for enhanced spectral data collection |
Pengyu Han |
2024-04-23 |
$64,043,000 |
| 11901203 |
Substrate process endpoint detection using machine learning |
Pengyu Han, Shu-Yu Chen, Todd Egan, Wan Hsueh Lai, Chao-Hsien Lee +3 more |
2024-02-13 |
$47,589,000 |
| 11735401 |
In-situ optical chamber surface and process sensor |
Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan |
2023-08-22 |
$40,609,000 |
| 11719952 |
Adjustable achromatic collimator assembly for endpoint detection systems |
Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Upendra Ummethala, Michael Kutney |
2023-08-08 |
$46,911,000 |
| 11709477 |
Autonomous substrate processing system |
Priyadarshi Panda, Pengyu Han, Todd Egan, Prashant Aji, Eli Mor +2 more |
2023-07-25 |
$93,796,000 |
| 11421977 |
Eliminating internal reflections in an interferometric endpoint detection system |
Pengyu Han |
2022-08-23 |
$37,610,000 |
| 11114286 |
In-situ optical chamber surface and process sensor |
Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan |
2021-09-07 |
$49,370,000 |
| 9601396 |
3D NAND staircase CD control by using interferometric endpoint detection |
— |
2017-03-21 |
$25,880,000 |
| 9240359 |
3D NAND staircase CD control by using interferometric endpoint detection |
— |
2016-01-19 |
$15,148,000 |
| 9200950 |
Pulsed plasma monitoring using optical sensor and a signal analyzer forming a mean waveform |
Quentin Ernie Walker, Dermot Cantwell |
2015-12-01 |
$8,913,000 |
| 8956886 |
Embedded test structure for trimming process control |
Samer Banna, Olivier Joubert, Maxime Darnon, Nicolas Posseme, Laurent Vallier |
2015-02-17 |
$27,626,000 |
| 8274645 |
Method and apparatus for in-situ metrology of a workpiece disposed in a vacuum processing chamber |
Matthew F. Davis, Thorsten Lill |
2012-09-25 |
$16,356,000 |
| 8257546 |
Method and system for monitoring an etch process |
Matthew F. Davis, John M. Yamartino |
2012-09-04 |
$11,311,000 |
| 8232212 |
Within-sequence metrology based process tuning for adaptive self-aligned double patterning |
Matthew F. Davis, Thorsten Lill |
2012-07-31 |
$11,506,000 |
| 8130382 |
Determining endpoint in a substrate process |
Matthew F. Davis |
2012-03-06 |
$9,163,000 |
| 8009938 |
Advanced process sensing and control using near infrared spectral reflectometry |
Matthew F. Davis |
2011-08-30 |
$11,098,000 |
| 7969581 |
Determining endpoint in a substrate process |
Matthew F. Davis |
2011-06-28 |
$3,915,000 |
| 7815812 |
Method for controlling a process for fabricating integrated devices |
Matthew F. Davis, Barbara Schmidt |
2010-10-19 |
$11,079,000 |
| 7808651 |
Determining endpoint in a substrate process |
Matthew F. Davis |
2010-10-05 |
$8,418,000 |
