Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7695987 | Method for automatic determination of semiconductor plasma chamber matching and source of fault by comprehensive plasma monitoring | Matthew F. Davis | 2010-04-13 |
| 7652774 | Interferometric endpoint determination in a substrate etching process | Matthew F. Davis | 2010-01-26 |
| 7602484 | Method and apparatus for performing limited area spectral analysis | Matthew F. Davis, Yasuhiro Uo, Michael D. Willwerth, Andrei Ivanovich Netchitaliouk | 2009-10-13 |
| 7393459 | Method for automatic determination of substrates states in plasma processing chambers | Matthew F. Davis, Quentin Ernie Walker | 2008-07-01 |
| 7330244 | Method and apparatus for performing limited area spectral analysis | Matthew F. Davis, Yasuhiro Uo, Michael D. Willwerth, Andrei Ivanovich Netchitaliouk | 2008-02-12 |
| 7306696 | Interferometric endpoint determination in a substrate etching process | Matthew F. Davis | 2007-12-11 |
| 7169625 | Method for automatic determination of semiconductor plasma chamber matching and source of fault by comprehensive plasma monitoring | Matthew F. Davis | 2007-01-30 |
| 7158221 | Method and apparatus for performing limited area spectral analysis | Matthew F. Davis, Yasuhiro Uo, Michael D. Willwerth, Andrei Ivanovich Netchitaliouk | 2007-01-02 |