Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12265377 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Todd Egan, Prashant Aji +2 more | 2025-04-01 | |
| 11978647 | Method and apparatus for measuring erosion and calibrating position for a moving process kit | Charles G. Potter, Sergio Lopez Carbajal | 2024-05-07 | $105,661,000 |
| 11709477 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Todd Egan, Prashant Aji +2 more | 2023-07-25 | $93,796,000 |
| 11521872 | Method and apparatus for measuring erosion and calibrating position for a moving process kit | Charles G. Potter, Sergio Lopez Carbajal | 2022-12-06 | $44,170,000 |
| 11387122 | Method and apparatus for measuring process kit centering | Charles G. Potter | 2022-07-12 | $30,931,000 |
| 10847393 | Method and apparatus for measuring process kit centering | Charles G. Potter | 2020-11-24 | $38,395,000 |
| 10794681 | Long range capacitive gap measurement in a wafer form sensor system | Charles G. Potter | 2020-10-06 | $62,697,000 |