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Assignee

• Applied Materials

Inventors

• Sidharth Bhatia (26 patents)
• Roger Alan Lindley (23 patents)
• Upendra Ummethala (38 patents)
• Thaddeus Siu-Por Li (7 patents)
• Michael Howells (3 patents)
• Steven E. Babayan (28 patents)
• Unknown

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