Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8724115 | Linear stage and metrology architecture for reflective electron beam lithography | Upendra Ummethala, Layton Hale, Samir Nayfeh, Mark Williams, Joseph A. DiRegolo +1 more | 2014-05-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8724115 | Linear stage and metrology architecture for reflective electron beam lithography | Upendra Ummethala, Layton Hale, Samir Nayfeh, Mark Williams, Joseph A. DiRegolo +1 more | 2014-05-13 |