Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12133318 | Rotating target for extreme ultraviolet source with liquid metal | Rui-fang Shi | 2024-10-29 |
| 11635700 | Method and apparatus for EUV mask inspection | Erel Milshtein, Konstantin Tsigutkin, Lauren Wilson, Lubomyr Kucher, Brian Ahr +4 more | 2023-04-25 |
| 11343899 | Droplet generation for a laser produced plasma light source | Brian Ahr, Rudy F. Garcia, Layton Hale, Oleg Khodykin | 2022-05-24 |
| 11073487 | Methods and systems for characterization of an x-ray beam with high spatial resolution | Nikolay Artemiev, Joseph A. Di Regolo, Antonio Arion Gellineau, Alexander Kuznetsov, Andrei Veldman +1 more | 2021-07-27 |
| 10959318 | X-ray metrology system with broadband laser produced plasma illuminator | Oleg Khodykin | 2021-03-23 |
| 10880979 | Droplet generation for a laser produced plasma light source | Brian Ahr, Rudy F. Garcia, Layton Hale, Oleg Khodykin | 2020-12-29 |
| 10816486 | Multilayer targets for calibration and alignment of X-ray based measurement systems | Nikolay Artemiev, Antonio Arion Gellineau, Alexander Kuznetsov | 2020-10-27 |
| 10359377 | Beam shaping slit for small spot size transmission small angle X-ray scatterometry | Nikolay Artemiev, Joseph A. Di Regolo, John Viatella | 2019-07-23 |
| 10034362 | Plasma-based light source | Alexey Kuritsyn, Michael P. Kanouff, Oleg Khodykin | 2018-07-24 |
| 9989758 | Debris protection system for reflective optic utilizing gas flow | Alexey Kuritsyn, Oleg Khodykin | 2018-06-05 |
| 9713239 | Laser produced plasma EUV light source | Bjorn Hansson, Igor V. Fomenkov, David C. Brandt | 2017-07-18 |
| 9544984 | System and method for generation of extreme ultraviolet light | Oleg Khodykin, Daniel Wack, Konstantin Tsigutkin, Layton Hale, Joseph F. Walsh +3 more | 2017-01-10 |
| 9420678 | System and method for producing an exclusionary buffer gas flow in an EUV light source | Oleg Khodykin | 2016-08-16 |
| 9295147 | EUV light source using cryogenic droplet targets in mask inspection | Oleg Khodykin, Daniel Wack | 2016-03-22 |
| 9000404 | Systems and methods for optics cleaning in an EUV light source | Silvia De Dea, Alexander I. Ershov, Vladimir B. Fleurov, Igor V. Fomenkov, William N. Partlo | 2015-04-07 |
| 8704200 | Laser produced plasma EUV light source | Igor V. Fomenkov | 2014-04-22 |
| 8633459 | Systems and methods for optics cleaning in an EUV light source | Silvia De Dea, Alexander I. Ershov, Vladimir B. Fleurov, Igor V. Fomenkov, William N. Partlo | 2014-01-21 |
| 8519366 | Debris protection system having a magnetic field for an EUV light source | Alexander I. Ershov | 2013-08-27 |
| 8461560 | LPP EUV light source drive laser system | Alexander I. Ershov, Oleh Khodykin, Igor V. Fomenkov | 2013-06-11 |
| 8314398 | EUV light source components and methods for producing, using and refurbishing same | Norbert Bowering, Igor V. Fomenkov, Oleh Khodykin | 2012-11-20 |
| 8198615 | Gas management system for a laser-produced-plasma EUV light source | Alexander I. Ershov, Igor V. Fomenkov, David C. Brandt | 2012-06-12 |
| 8035092 | Laser produced plasma EUV light source | Norbert Bowering, Igor V. Fomenkov, Alexander I. Ershov, Oleh Khodykin | 2011-10-11 |
| 8017924 | Drive laser delivery systems for EUV light source | Igor V. Fomenkov, Alexander I. Ershov | 2011-09-13 |
| 7928417 | LPP EUV light source drive laser system | Alexander I. Ershov, Oleh Khodykin, Igor V. Fomenkov | 2011-04-19 |
| 7916388 | Drive laser for EUV light source | — | 2011-03-29 |